Micromachined resonators : A review

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Article number160
Journal / PublicationMicromachines
Volume7
Issue number9
Online published8 Sep 2016
Publication statusPublished - Sep 2016

Link(s)

Abstract

This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material.

Research Area(s)

  • Micro-electro-mechanical systems, Microresonators, Resonance

Citation Format(s)

Micromachined resonators : A review. / Abdolvand, Reza; Bahreyni, Behraad; Lee, Joshua E. -Y.; Nabki, Frederic.

In: Micromachines, Vol. 7, No. 9, 160, 09.2016.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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