TY - GEN
T1 - Micromachined polymer actuators as tactors for tactile display
AU - To, Tony K. H.
AU - Zhou, Jennifer W. L.
AU - Chan, Hoyin
AU - Li, Wen J.
AU - Liu, Yunhui
PY - 2003/10
Y1 - 2003/10
N2 - MEMS fabricated smart polymer actuators such as Nafion and PANI are proposed as tactors in the development of tactors-on-chip for applications in virtual reality and tele-operations. Two different polymer materials, i.e., Nafion and PANI, were investigated as potential materials to construct the tactors. Thus far, we have successfully demonstrated that these polymer materials can in fact be used to fabricate MEMS-scale actuators with actuation voltage of less than 10 V. Nafion actuators (w=100 μm, l=1200 μm, t=0.4 μm) were actuated with input power of ∼50 mW and showed dynamic response up to 9 Hz. PANI actuators (w=50 μm, l=200 μm, t∼1 μm) were shown to actuate in 0.5 M HCl solution using 2.5 V input voltage. The fabrication process for these polymer actuators, their experimental results, and a proposed tactors-on-chip design is presented in this paper.
AB - MEMS fabricated smart polymer actuators such as Nafion and PANI are proposed as tactors in the development of tactors-on-chip for applications in virtual reality and tele-operations. Two different polymer materials, i.e., Nafion and PANI, were investigated as potential materials to construct the tactors. Thus far, we have successfully demonstrated that these polymer materials can in fact be used to fabricate MEMS-scale actuators with actuation voltage of less than 10 V. Nafion actuators (w=100 μm, l=1200 μm, t=0.4 μm) were actuated with input power of ∼50 mW and showed dynamic response up to 9 Hz. PANI actuators (w=50 μm, l=200 μm, t∼1 μm) were shown to actuate in 0.5 M HCl solution using 2.5 V input voltage. The fabrication process for these polymer actuators, their experimental results, and a proposed tactors-on-chip design is presented in this paper.
UR - http://www.scopus.com/inward/record.url?scp=84991000198&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84991000198&origin=recordpage
U2 - 10.1109/RISSP.2003.1285670
DO - 10.1109/RISSP.2003.1285670
M3 - RGC 32 - Refereed conference paper (with host publication)
SP - 704
EP - 709
BT - Proceedings of the 2003 IEEE International Conference on Robotics, Intelligent Systems and Signal Processing
PB - IEEE
T2 - IEEE International Conference on Robotics, Intelligent Systems and Signal Processing, RISSP 2003
Y2 - 8 October 2003 through 13 October 2003
ER -