Micromachined capacitive switches at microwave frequencies

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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Author(s)

  • C. H. Wong
  • M. J. Tan
  • L. H. Guo
  • J. M. Huang
  • A. Q. Liu

Detail(s)

Original languageEnglish
Pages (from-to)140-148
Journal / PublicationProceedings of SPIE - The International Society for Optical Engineering
Volume4175
Publication statusPublished - 2000
Externally publishedYes

Conference

TitleMterials and Devices Characterization in Micromachining III
CitySanta Clara, CA, USA
Period18 - 19 September 2000

Abstract

Both electrical and mechanical models, exemplified with a micromachined capacitive switch with simple bridge structure, accurately describing its electrical and mechanical characteristics are described in this paper. The electrical model is represented as a RLC circuit, while the mechanical model is represented as a fixed-fixed beam. The advantage of these models is that it is possible to pre-determine various characteristics, such as the switching time of micromachined capacitive switches, during the design stage. These models can be used to accurately design micromachined capacitive switches for microwave applications. An illustrated fabrication process is also discussed.

Citation Format(s)

Micromachined capacitive switches at microwave frequencies. / Wong, C. H.; Tan, M. J.; Guo, L. H.; Huang, J. M.; Liew, K. M.; Liu, A. Q.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4175, 2000, p. 140-148.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal