Microfabricated preconcentrator for quantitative analysis of low concentration volatile organic compounds

Helena K. L. Chan; Masahiko Takei; Stella W. Pang; Rebecca A. Veeneman; Edward T. Zellers

doi:10.1109/SENSOR.2005.1497515

Microfabricated preconcentrator for quantitative analysis of low concentration volatile organic compounds

Helena K. L. Chan
, Masahiko Takei
, Stella W. Pang
, Rebecca A. Veeneman
, Edward T. Zellers

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

5 Citations (Scopus)

Abstract

A microfabricated preconcentrator that demonstrates vapor trapping ability for part-per-billion volatile organic compounds and integrated temperature sensing for heat transfer measurements is demonstrated. The new preconcentrator design accommodates 3.3 mg of carbon adsorbents in a series of three 450 □m deep Si cavities fabricated using deep reactive ion etching and sealed using wafer-level Au-Au thermocompression bonding at 400°C. Backside Pt resistance temperature detectors (RTDs) are integrated to monitor heating rates and study forced convective heat transfer during the thermal desorption cycle where the preconcentrator is heated to 300°C. The preconcentrator is being developed to enable high-speed chromatographic separations as a part of a low-power, portable microscale gas chromatography system. © 2005 IEEE.

Original language	English
Title of host publication	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Pages	2091-2094
Volume	2
DOIs	https://doi.org/10.1109/SENSOR.2005.1497515
Publication status	Published - 2005
Externally published	Yes
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005 https://ieeexplore.ieee.org/xpl/conhome/9993/proceeding

Publication series

Name
Volume	2

Conference

Conference	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Place	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05
Internet address	https://ieeexplore.ieee.org/xpl/conhome/9993/proceeding

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Research Keywords

Gas chromatography
Microfabrication
Preconcentrator

Access Output

10.1109/SENSOR.2005.1497515

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Chan, H. K. L., Takei, M., Pang, S. W., Veeneman, R. A., & Zellers, E. T. (2005). Microfabricated preconcentrator for quantitative analysis of low concentration volatile organic compounds. In Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 (Vol. 2, pp. 2091-2094). Article 4D2.4 https://doi.org/10.1109/SENSOR.2005.1497515

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title = "Microfabricated preconcentrator for quantitative analysis of low concentration volatile organic compounds",

abstract = "A microfabricated preconcentrator that demonstrates vapor trapping ability for part-per-billion volatile organic compounds and integrated temperature sensing for heat transfer measurements is demonstrated. The new preconcentrator design accommodates 3.3 mg of carbon adsorbents in a series of three 450 □m deep Si cavities fabricated using deep reactive ion etching and sealed using wafer-level Au-Au thermocompression bonding at 400°C. Backside Pt resistance temperature detectors (RTDs) are integrated to monitor heating rates and study forced convective heat transfer during the thermal desorption cycle where the preconcentrator is heated to 300°C. The preconcentrator is being developed to enable high-speed chromatographic separations as a part of a low-power, portable microscale gas chromatography system. {\textcopyright} 2005 IEEE.",

keywords = "Gas chromatography, Microfabrication, Preconcentrator",

author = "Chan, \{Helena K. L.\} and Masahiko Takei and Pang, \{Stella W.\} and Veeneman, \{Rebecca A.\} and Zellers, \{Edward T.\}",

year = "2005",

doi = "10.1109/SENSOR.2005.1497515",

language = "English",

isbn = "0780389948",

volume = "2",

pages = "2091--2094",

booktitle = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",

note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

url = "https://ieeexplore.ieee.org/xpl/conhome/9993/proceeding",

}

Chan, HKL, Takei, M, Pang, SW, Veeneman, RA & Zellers, ET 2005, Microfabricated preconcentrator for quantitative analysis of low concentration volatile organic compounds. in Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. vol. 2, 4D2.4, pp. 2091-2094, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1497515

Microfabricated preconcentrator for quantitative analysis of low concentration volatile organic compounds. / Chan, Helena K. L.; Takei, Masahiko; Pang, Stella W. et al.
Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 2 2005. p. 2091-2094 4D2.4.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Microfabricated preconcentrator for quantitative analysis of low concentration volatile organic compounds

AU - Chan, Helena K. L.

AU - Takei, Masahiko

AU - Pang, Stella W.

AU - Veeneman, Rebecca A.

AU - Zellers, Edward T.

PY - 2005

Y1 - 2005

N2 - A microfabricated preconcentrator that demonstrates vapor trapping ability for part-per-billion volatile organic compounds and integrated temperature sensing for heat transfer measurements is demonstrated. The new preconcentrator design accommodates 3.3 mg of carbon adsorbents in a series of three 450 □m deep Si cavities fabricated using deep reactive ion etching and sealed using wafer-level Au-Au thermocompression bonding at 400°C. Backside Pt resistance temperature detectors (RTDs) are integrated to monitor heating rates and study forced convective heat transfer during the thermal desorption cycle where the preconcentrator is heated to 300°C. The preconcentrator is being developed to enable high-speed chromatographic separations as a part of a low-power, portable microscale gas chromatography system. © 2005 IEEE.

AB - A microfabricated preconcentrator that demonstrates vapor trapping ability for part-per-billion volatile organic compounds and integrated temperature sensing for heat transfer measurements is demonstrated. The new preconcentrator design accommodates 3.3 mg of carbon adsorbents in a series of three 450 □m deep Si cavities fabricated using deep reactive ion etching and sealed using wafer-level Au-Au thermocompression bonding at 400°C. Backside Pt resistance temperature detectors (RTDs) are integrated to monitor heating rates and study forced convective heat transfer during the thermal desorption cycle where the preconcentrator is heated to 300°C. The preconcentrator is being developed to enable high-speed chromatographic separations as a part of a low-power, portable microscale gas chromatography system. © 2005 IEEE.

KW - Gas chromatography

KW - Microfabrication

KW - Preconcentrator

UR - https://www.scopus.com/pages/publications/27544476994

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-27544476994&origin=recordpage

U2 - 10.1109/SENSOR.2005.1497515

DO - 10.1109/SENSOR.2005.1497515

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0780389948

SN - 9780780389946

VL - 2

SP - 2091

EP - 2094

BT - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -

Microfabricated preconcentrator for quantitative analysis of low concentration volatile organic compounds

Abstract

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UN SDGs

Research Keywords

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