Microcrystalline diamond films by direct ion beam deposition

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

4 Scopus Citations
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Author(s)

  • J. Y. Feng
  • N. G. Shang
  • X. S. Sun
  • I. Bello
  • S. T. Lee

Detail(s)

Original languageEnglish
Pages (from-to)872-876
Journal / PublicationDiamond and Related Materials
Volume9
Issue number3
Publication statusPublished - Apr 2000

Conference

Title10th European Conference on Diamond, Diamond-like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide
CityPrague, Czech Republic
Period12 - 17 September 1999

Abstract

Microcrystalline diamond films have been successfully synthesized by direct ion beam deposition. Low energy (60-200 eV) ions of hydrocarbon, argon and hydrogen generated in a Kaufman ion source were perpendicularly directed to (100) silicon substrates pretreated by diamond powder scratching. Diamond particles of approximately 1 micron in size embedded in a matrix of amorphous carbon were obtained at an ion energy of 80 eV, a methane concentration of 1%, and a substrate temperature of 700 °C. The feature of diamond was confirmed by Raman spectroscopy and X-ray diffraction. The mechanism of ion-induced formation of microcrystalline diamond was discussed.

Citation Format(s)

Microcrystalline diamond films by direct ion beam deposition. / Feng, J. Y.; Shang, N. G.; Sun, X. S. et al.
In: Diamond and Related Materials, Vol. 9, No. 3, 04.2000, p. 872-876.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review