Microcrystalline diamond films by direct ion beam deposition

J. Y. Feng, N. G. Shang, X. S. Sun, I. Bello, C. S. Lee, S. T. Lee

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

4 Citations (Scopus)

Abstract

Microcrystalline diamond films have been successfully synthesized by direct ion beam deposition. Low energy (60-200 eV) ions of hydrocarbon, argon and hydrogen generated in a Kaufman ion source were perpendicularly directed to (100) silicon substrates pretreated by diamond powder scratching. Diamond particles of approximately 1 micron in size embedded in a matrix of amorphous carbon were obtained at an ion energy of 80 eV, a methane concentration of 1%, and a substrate temperature of 700 °C. The feature of diamond was confirmed by Raman spectroscopy and X-ray diffraction. The mechanism of ion-induced formation of microcrystalline diamond was discussed.
Original languageEnglish
Pages (from-to)872-876
JournalDiamond and Related Materials
Volume9
Issue number3
DOIs
Publication statusPublished - Apr 2000
Event10th European Conference on Diamond, Diamond-like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide - Prague, Czech Republic
Duration: 12 Sept 199917 Sept 1999

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