Microbridge method determining the mechanical properties of low stress LPCVD silicon nitride film and its error analysis

Denggang Zong; Zuankai Wang; Deren Lu; Conghe Wong

doi:10.16579/j.issn.1001.9669.2003.04.010

Microbridge method determining the mechanical properties of low stress LPCVD silicon nitride film and its error analysis

Denggang Zong
, Zuankai Wang
, Deren Lu
, Conghe Wong

Research output: Journal Publications and Reviews › RGC 22 - Publication in policy or professional journal

Original language	English
Journal	Jixie Qiangdu/Journal of Mechanical Strength
Volume	25
Issue number	4
DOIs	https://doi.org/10.16579/j.issn.1001.9669.2003.04.010
Publication status	Published - Aug 2003
Externally published	Yes

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title = "Microbridge method determining the mechanical properties of low stress LPCVD silicon nitride film and its error analysis",

author = "Denggang Zong and Zuankai Wang and Deren Lu and Conghe Wong",

year = "2003",

month = aug,

doi = "10.16579/j.issn.1001.9669.2003.04.010",

language = "English",

volume = "25",

journal = "Jixie Qiangdu/Journal of Mechanical Strength",

issn = "1001-9669",

publisher = "Chinese Mechanical Engineering Society",

number = "4",

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TY - JOUR

T1 - Microbridge method determining the mechanical properties of low stress LPCVD silicon nitride film and its error analysis

AU - Zong, Denggang

AU - Wang, Zuankai

AU - Lu, Deren

AU - Wong, Conghe

PY - 2003/8

Y1 - 2003/8

UR - https://www.scopus.com/pages/publications/0041377937

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0041377937&origin=recordpage

U2 - 10.16579/j.issn.1001.9669.2003.04.010

DO - 10.16579/j.issn.1001.9669.2003.04.010

M3 - RGC 22 - Publication in policy or professional journal

SN - 1001-9669

VL - 25

JO - Jixie Qiangdu/Journal of Mechanical Strength

JF - Jixie Qiangdu/Journal of Mechanical Strength

IS - 4

ER -

Microbridge method determining the mechanical properties of low stress LPCVD silicon nitride film and its error analysis

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