Microassembly of three-dimensional rotary MEMS mirrors

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

3 Scopus Citations
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Author(s)

Detail(s)

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume7208
Publication statusPublished - 2009
Externally publishedYes

Publication series

Name
Volume7208
ISSN (Print)0277-786X

Conference

TitleMOEMS and Miniaturized Systems VIII
PlaceUnited States
CitySan Jose, CA
Period27 - 28 January 2009

Abstract

We present a novel approach to construct three-dimensional rotary micro-mirrors, which are fundamental components to build 1 × N or N × M optical switching systems. A rotary micro-mirror consists of two microparts: a rotary micro-motor and a micro-mirror. Both of the two microparts are fabricated with PolyMUMPs, a surface micromachining process. A sequential robotic microassembly process is developed to join the two microparts together to construct a three-dimensional device. In order to achieve high positioning accuracy and a strong mechanical connection, the micro-mirror is joined to the micro-motor using an adhesive mechanical fastener. The mechanical fastener has self-alignment ability and provides a temporary joint between the two microparts. The adhesive bonding can create a strong permanent connection, which does not require extra supporting plates for the micro-mirror. A hybrid manipulation strategy, which includes pick-and-place and pushing-based manipulations, is utilized to manipulation the micro-mirror. The pick-and-place manipulation has the ability to globally position the micro-mirror in six degrees of freedom. The pushing-based manipulation can achieve high positioning accuracy. This microassembly approach has great flexibility and high accuracy; furthermore, it does not require extra supporting plates, which greatly simplifies the assembly process. © 2009 SPIE.

Research Area(s)

  • Adhesive mechanical fastener, Micro-Electromechanical Systems (MEMS), Micro-mirror, Microassembly, Micromanipulation

Citation Format(s)

Microassembly of three-dimensional rotary MEMS mirrors. / Wang, Lidai; Mills, James K.; Cleghorn, William L.
Proceedings of SPIE - The International Society for Optical Engineering. Vol. 7208 2009. 72080B.

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review