Microassembly of three-dimensional rotary MEMS mirrors

We present a novel approach to construct three-dimensional rotary micro-mirrors, which are fundamental components to build 1 × N or N × M optical switching systems. A rotary micro-mirror consists of two microparts: a rotary micro-motor and a micro-mirror. Both of the two microparts are fabricated with PolyMUMPs, a surface micromachining process. A sequential robotic microassembly process is developed to join the two microparts together to construct a three-dimensional device. In order to achieve high positioning accuracy and a strong mechanical connection, the micro-mirror is joined to the micro-motor using an adhesive mechanical fastener. The mechanical fastener has self-alignment ability and provides a temporary joint between the two microparts. The adhesive bonding can create a strong permanent connection, which does not require extra supporting plates for the micro-mirror. A hybrid manipulation strategy, which includes pick-and-place and pushing-based manipulations, is utilized to manipulation the micro-mirror. The pick-and-place manipulation has the ability to globally position the micro-mirror in six degrees of freedom. The pushing-based manipulation can achieve high positioning accuracy. This microassembly approach has great flexibility and high accuracy; furthermore, it does not require extra supporting plates, which greatly simplifies the assembly process. © 2009 SPIE.