Micro ICPF actuators for aqueous sensing and manipulation

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

21 Scopus Citations
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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)406-412
Journal / PublicationSensors and Actuators, A: Physical
Volume114
Issue number2-3
Publication statusPublished - 1 Sept 2004
Externally publishedYes

Conference

TitleSelected Papers from Transducers 03
PlaceUnited States
CityBoston, MA
Period8 - 12 June 2003

Abstract

This paper presents the results of our ongoing investigation of using Nafion solution to construct micron scale actuators as grippers to operate under aqueous environment. Thus far, we have demonstrated that MEMS-based fabrication of cantilever structures composed of Au/Nafion/Au tri-layers on silicon substrates is possible using Nafion solution. The smallest actuators fabricated were 30μm wide, 300μm long and 0.4μm thick. We have shown that two-finger actuators (each 100μm wide, 1200μm long and 0.4μm thick) can be fully actuated in water at ∼7V DC. In addition, with a special sacrificial release process, micro ICPF structures can be made to curl whenever they come in contact with water, and can be de-curled instantaneously when they are immersed in acid, suggesting that they can be used in sensing pH level changes. © 2003 Elsevier B.V. All rights reserved.

Research Area(s)

  • Micro ICPF, Polymer actuator, Underwater actuator

Citation Format(s)

Micro ICPF actuators for aqueous sensing and manipulation. / Zhou, Wenli; Li, Wen J.
In: Sensors and Actuators, A: Physical, Vol. 114, No. 2-3, 01.09.2004, p. 406-412.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review