Micro channel fabrication in PMMA substrates using CO2 laser and sacrificial mask process

Guangyi Shi; Qiang Huang; Wen J. Li; Wenqian Huang; Yanyun Ren; Jun Li; Kejie Li

doi:10.1109/ICIA.2004.1373332

Micro channel fabrication in PMMA substrates using CO₂ laser and sacrificial mask process

Guangyi Shi, Qiang Huang, Wen J. Li, Wenqian Huang, Yanyun Ren, Jun Li, Kejie Li

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

2 Citations (Scopus)

Abstract

A novel system for 3D microchannel fabrication based on CO₂ laser-micromachining is presented. The system consists of a CO₂ laser focusing system and a 3D precision positioning platform. The CO₂ laser focusing system can regulate a laser beam which is of high-energy and of micron dimension in beam diameter, and the movement precision of the 3D platform is of micron dimension. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO₂ laser and the platform. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by the experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently. © 2004 IEEE.

Original language	English
Title of host publication	Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004
Publisher	IEEE
Pages	116-121
ISBN (Print)	0780386299
DOIs	https://doi.org/10.1109/ICIA.2004.1373332
Publication status	Published - Jun 2004
Externally published	Yes
Event	2004 International Conference on Information Acquisition (ICIA 2004) - Hefei, China Duration: 21 Jun 2004 → 25 Jun 2004

Conference

Conference	2004 International Conference on Information Acquisition (ICIA 2004)
Place	China
City	Hefei
Period	21/06/04 → 25/06/04

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/ICIA.2004.1373332

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Cite this

@inproceedings{dc45b7297fd74dbab989db94d70af074,

title = "Micro channel fabrication in PMMA substrates using CO2 laser and sacrificial mask process",

abstract = "A novel system for 3D microchannel fabrication based on CO2 laser-micromachining is presented. The system consists of a CO2 laser focusing system and a 3D precision positioning platform. The CO2 laser focusing system can regulate a laser beam which is of high-energy and of micron dimension in beam diameter, and the movement precision of the 3D platform is of micron dimension. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO2 laser and the platform. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by the experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently. {\textcopyright} 2004 IEEE.",

author = "Guangyi Shi and Qiang Huang and Li, {Wen J.} and Wenqian Huang and Yanyun Ren and Jun Li and Kejie Li",

year = "2004",

month = jun,

doi = "10.1109/ICIA.2004.1373332",

language = "English",

isbn = "0780386299",

pages = "116--121",

booktitle = "Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004",

publisher = "IEEE",

address = "United States",

note = "2004 International Conference on Information Acquisition (ICIA 2004) ; Conference date: 21-06-2004 Through 25-06-2004",

}

Shi, G, Huang, Q, Li, WJ, Huang, W, Ren, Y, Li, J & Li, K 2004, Micro channel fabrication in PMMA substrates using CO₂ laser and sacrificial mask process. in Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004. IEEE, pp. 116-121, 2004 International Conference on Information Acquisition (ICIA 2004), Hefei, China, 21/06/04. https://doi.org/10.1109/ICIA.2004.1373332

Micro channel fabrication in PMMA substrates using CO₂ laser and sacrificial mask process. / Shi, Guangyi; Huang, Qiang; Li, Wen J. et al.
Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004. IEEE, 2004. p. 116-121.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

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AU - Shi, Guangyi

AU - Huang, Qiang

AU - Li, Wen J.

AU - Huang, Wenqian

AU - Ren, Yanyun

AU - Li, Jun

AU - Li, Kejie

PY - 2004/6

Y1 - 2004/6

N2 - A novel system for 3D microchannel fabrication based on CO2 laser-micromachining is presented. The system consists of a CO2 laser focusing system and a 3D precision positioning platform. The CO2 laser focusing system can regulate a laser beam which is of high-energy and of micron dimension in beam diameter, and the movement precision of the 3D platform is of micron dimension. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO2 laser and the platform. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by the experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently. © 2004 IEEE.

AB - A novel system for 3D microchannel fabrication based on CO2 laser-micromachining is presented. The system consists of a CO2 laser focusing system and a 3D precision positioning platform. The CO2 laser focusing system can regulate a laser beam which is of high-energy and of micron dimension in beam diameter, and the movement precision of the 3D platform is of micron dimension. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO2 laser and the platform. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by the experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently. © 2004 IEEE.

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BT - Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004

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