Method for Forming Piezoelectric Films on Surfaces of Arbitrary Morphologies
Research output: Patents, Agreements and Assignments › RGC 51 - Patents (CityU)
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Detail(s)
Original language | English |
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Patent number | US11,818,955 |
Filing number | 17/445,959 |
Publication status |
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Link(s)
Other link(s) | |
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Permanent Link | https://scholars.cityu.edu.hk/en/publications/publication(df9416fd-eca0-4483-9ed8-20a1b7145c3c).html |
Citation Format(s)
Method for Forming Piezoelectric Films on Surfaces of Arbitrary Morphologies. / YANG, Zhengbao (Inventor); LIU, Shiyuan (Inventor).
Patent No.: US11,818,955. Nov 14, 2023.
Patent No.: US11,818,955. Nov 14, 2023.
Research output: Patents, Agreements and Assignments › RGC 51 - Patents (CityU)