Method for Forming Piezoelectric Films on Surfaces of Arbitrary Morphologies

Zhengbao YANG (Inventor), Shiyuan LIU (Inventor)

Research output: Patents, Agreements and AssignmentsRGC 51 - Patents (CityUHK)

Original languageEnglish
Patent numberUS11,818,955
Publication statusPublished - 14 Nov 2023

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