@inproceedings{bc532f63164c4b22a2c084ffa061cfa4,
title = "MEMS-Fabricated ICPF Grippers for Aqueous Applications",
abstract = "This paper presents the results of our ongoing investigation of using Nafion solution to construct micron scale actuators as grippers for underwater manipulation. We have demonstrated MEMS-based fabrication of cantilever structures composed of Au/Nafion/Au film layers on silicon substrates is possible. The smallest actuators fabricated were 30μm wide, 300μm long and 0.4μm thick. We have shown that 2-finger actuators (each 100μm wide, 1200μm long and 0.4μm thick) could be fully actuated in water at ∼7V DC. In addition, we have found that micro Au/Nafion/Au cantilevers can respond to pH level changes in a solution environment, suggesting that they could potentially be used as biological sensors.",
keywords = "Actuators, Chemical technology, Conducting materials, Fabrication, Grippers, Microactuators, Microinjection, Micromechanical devices, Polymer films, Robotics and automation",
author = "Zhou, {J. W L} and Li, {W. J.}",
year = "2003",
doi = "10.1109/SENSOR.2003.1215377",
language = "English",
isbn = "0780377311",
volume = "1",
publisher = "IEEE",
pages = "556--559",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "United States",
note = "12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
}