MEMS electrometer system simulation using a time-domain variable capacitor model

Yong Zhu; Joshua Lee; Ashwin Seshia

doi:10.1109/SENSOR.2007.4300475

MEMS electrometer system simulation using a time-domain variable capacitor model

Yong Zhu
, Joshua Lee
, Ashwin Seshia

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

5 Citations (Scopus)

Abstract

System level simulation on a micromachined variable capacitor electrometer was implemented using a voltage source representation method creating a nonlinear time-domain variable capacitor model in SPICE. We show that a circuit model can be created for any arbitrary nonlinear capacitive MEMS element for embedded co-simulation with interface electronics. The simulation results are in good agreement with experimental data. This simple technique is proposed as a method to provide the missing link in aiding system level design optimization of both electro-mechanical structures and sensor electronics within the same simulation interface. ©2007 IEEE.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1685-1688
DOIs	https://doi.org/10.1109/SENSOR.2007.4300475
Publication status	Published - 2007
Externally published	Yes
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Place	France
City	Lyon
Period	10/06/07 → 14/06/07

Research Keywords

Electrometer
MEMS
System simulation
Variable capacitor model

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10.1109/SENSOR.2007.4300475

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@inproceedings{dd2b2a8ea9b44fbd87a1fad9c1f11a67,

title = "MEMS electrometer system simulation using a time-domain variable capacitor model",

abstract = "System level simulation on a micromachined variable capacitor electrometer was implemented using a voltage source representation method creating a nonlinear time-domain variable capacitor model in SPICE. We show that a circuit model can be created for any arbitrary nonlinear capacitive MEMS element for embedded co-simulation with interface electronics. The simulation results are in good agreement with experimental data. This simple technique is proposed as a method to provide the missing link in aiding system level design optimization of both electro-mechanical structures and sensor electronics within the same simulation interface. {\textcopyright}2007 IEEE.",

keywords = "Electrometer, MEMS, System simulation, Variable capacitor model",

author = "Yong Zhu and Joshua Lee and Ashwin Seshia",

year = "2007",

doi = "10.1109/SENSOR.2007.4300475",

language = "English",

isbn = "1424408423",

pages = "1685--1688",

booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",

}

Zhu, Y, Lee, J & Seshia, A 2007, MEMS electrometer system simulation using a time-domain variable capacitor model. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300475, pp. 1685-1688, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300475

MEMS electrometer system simulation using a time-domain variable capacitor model. / Zhu, Yong; Lee, Joshua; Seshia, Ashwin.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1685-1688 4300475.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - MEMS electrometer system simulation using a time-domain variable capacitor model

AU - Zhu, Yong

AU - Lee, Joshua

AU - Seshia, Ashwin

PY - 2007

Y1 - 2007

N2 - System level simulation on a micromachined variable capacitor electrometer was implemented using a voltage source representation method creating a nonlinear time-domain variable capacitor model in SPICE. We show that a circuit model can be created for any arbitrary nonlinear capacitive MEMS element for embedded co-simulation with interface electronics. The simulation results are in good agreement with experimental data. This simple technique is proposed as a method to provide the missing link in aiding system level design optimization of both electro-mechanical structures and sensor electronics within the same simulation interface. ©2007 IEEE.

AB - System level simulation on a micromachined variable capacitor electrometer was implemented using a voltage source representation method creating a nonlinear time-domain variable capacitor model in SPICE. We show that a circuit model can be created for any arbitrary nonlinear capacitive MEMS element for embedded co-simulation with interface electronics. The simulation results are in good agreement with experimental data. This simple technique is proposed as a method to provide the missing link in aiding system level design optimization of both electro-mechanical structures and sensor electronics within the same simulation interface. ©2007 IEEE.

KW - Electrometer

KW - MEMS

KW - System simulation

KW - Variable capacitor model

UR - https://www.scopus.com/pages/publications/50049116304

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-50049116304&origin=recordpage

U2 - 10.1109/SENSOR.2007.4300475

DO - 10.1109/SENSOR.2007.4300475

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 1424408423

SN - 9781424408429

SP - 1685

EP - 1688

BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07

Y2 - 10 June 2007 through 14 June 2007

ER -

MEMS electrometer system simulation using a time-domain variable capacitor model

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