@inproceedings{e29ca8c32b9748209f284472447e686c,
title = "Mechanically Coupled SOI Lam{\'e}-mode Resonator-Arrays: Synchronized Oscillations with High Quality Factors of 1 Million",
abstract = "In this work, we present the first demonstration of synchronized oscillations in an SOI resonator array with quality factors (Qs) in the order of 106 through mechanical coupling. We have fabricated arrays of up to six resonators. Our experimental results indicate that even as the length of the array is expanded, Q is maintained in the order of 106 at a resonant frequency of 13MHz. This yields an f•Q product of 1.3×1013, which is close to that of a single Lam{\'e} mode resonator. With Q maintained at 106, our results show that the motional resistance reduces according to the number of resonators incorporated into the array. These results in turn suggest that mechanical coupling can be extended to even yet longer arrays for reducing motional resistance as well as improve power handling without notably diminishing Q.",
keywords = "array, Lam{\'e} mode, mechanical coupling, motional resistance, quality factor",
author = "Yuanjie Xu and Lee, {Joshua E.-Y.}",
year = "2013",
month = jul,
doi = "10.1109/EFTF-IFC.2013.6702184",
language = "English",
isbn = "9781479903429",
publisher = "IEEE",
pages = "133--136",
booktitle = "2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC)",
address = "United States",
note = "2013 Joint European Frequency and Time Forum and International Frequency Control Symposium (EFTF/IFC 2013) ; Conference date: 21-07-2013 Through 25-07-2013",
}