TY - JOUR
T1 - Mechanical response of polar/non-polar ZnO under low dimensional stress
AU - Sung, T. H.
AU - Huang, J. C.
AU - Chen, H. C.
PY - 2013/6/17
Y1 - 2013/6/17
N2 - The mechanical properties of high quality polar (c-plane) and non-polar (a-plane and m-plane) ZnO wafers were examined by using nanoindentation and microcompression testing. The nano-scaled modulus, hardness, and yield strength readings of the c-plane, a-plane and m-plane ZnO wafers determined by nanoindentation are 140, 159, and 161; 7.1, 3.9, and 4.0; and 12.0, 6.7, and 4.5 GPa, respectively. The micro-scaled data directly measured by microcompression are much lower than the nano-scaled data. The cathodoluminescence images are in consistence with the slip systems observed from the transmission electron microscopy characterization.
AB - The mechanical properties of high quality polar (c-plane) and non-polar (a-plane and m-plane) ZnO wafers were examined by using nanoindentation and microcompression testing. The nano-scaled modulus, hardness, and yield strength readings of the c-plane, a-plane and m-plane ZnO wafers determined by nanoindentation are 140, 159, and 161; 7.1, 3.9, and 4.0; and 12.0, 6.7, and 4.5 GPa, respectively. The micro-scaled data directly measured by microcompression are much lower than the nano-scaled data. The cathodoluminescence images are in consistence with the slip systems observed from the transmission electron microscopy characterization.
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U2 - 10.1063/1.4811554
DO - 10.1063/1.4811554
M3 - RGC 21 - Publication in refereed journal
SN - 0003-6951
VL - 102
JO - Applied Physics Letters
JF - Applied Physics Letters
IS - 24
M1 - 241901
ER -