Mechanical and tribological properties of diamond-like carbon films prepared on steel by ECR-CVD process

K. Y. Li; Z. F. Zhou; C. Y. Chan; I. Bello; C. S. Lee; S. T. Lee

doi:10.1016/S0925-9635(01)00459-9

Mechanical and tribological properties of diamond-like carbon films prepared on steel by ECR-CVD process

K. Y. Li, Z. F. Zhou, C. Y. Chan, I. Bello, C. S. Lee, S. T. Lee

Centre of Super-Diamond and Advanced Films

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

39 Citations (Scopus)

Abstract

Diamond-like carbon (DLC) films were prepared on AISI 440C steel substrates at room temperature by the electron cyclotron resonance chemical vapor deposition (ECR-CVD) process in C₂H₂/Ar plasma under different conditions. In order to prevent the inter-diffusion of carbon and improve the adhesion strength of DLC films, functionally gradient Ti/TiN/TiCN/TiC supporting underlayers were deposited on the steel substrates in advance. Using the designed interfacial transition layers, relatively thick DLC films (1-2 μm) were successfully prepared on the steel substrates without delamination. By optimizing the deposition parameters, DLC films with hardness up to 28 GPa and friction coefficients lower than 0.15 against the 100Cr6 steel ball were obtained. In addition, the specific wear rates of the films were found to be extremely low (~ 10^-17 m³/Nm). The friction-induced graphitization mechanism of DLC was confirmed by micro-Raman analysis. © 2001 Elsevier Science B.V. All rights reserved.

Original language	English
Pages (from-to)	1855-1861
Journal	Diamond and Related Materials
Volume	10
Issue number	9-10
DOIs	https://doi.org/10.1016/S0925-9635(01)00459-9
Publication status	Published - Sept 2001

Research Keywords

Chemical vapour deposition (CVD)
Diamond-like carbon (DLC)
Electron cyclotron resonance (ECR)
Friction
Steel
Wear

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title = "Mechanical and tribological properties of diamond-like carbon films prepared on steel by ECR-CVD process",

abstract = "Diamond-like carbon (DLC) films were prepared on AISI 440C steel substrates at room temperature by the electron cyclotron resonance chemical vapor deposition (ECR-CVD) process in C2H2/Ar plasma under different conditions. In order to prevent the inter-diffusion of carbon and improve the adhesion strength of DLC films, functionally gradient Ti/TiN/TiCN/TiC supporting underlayers were deposited on the steel substrates in advance. Using the designed interfacial transition layers, relatively thick DLC films (1-2 μm) were successfully prepared on the steel substrates without delamination. By optimizing the deposition parameters, DLC films with hardness up to 28 GPa and friction coefficients lower than 0.15 against the 100Cr6 steel ball were obtained. In addition, the specific wear rates of the films were found to be extremely low (~ 10-17 m3/Nm). The friction-induced graphitization mechanism of DLC was confirmed by micro-Raman analysis. {\textcopyright} 2001 Elsevier Science B.V. All rights reserved.",

keywords = "Chemical vapour deposition (CVD), Diamond-like carbon (DLC), Electron cyclotron resonance (ECR), Friction, Steel, Wear",

author = "Li, {K. Y.} and Zhou, {Z. F.} and Chan, {C. Y.} and I. Bello and Lee, {C. S.} and Lee, {S. T.}",

year = "2001",

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doi = "10.1016/S0925-9635(01)00459-9",

language = "English",

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TY - JOUR

T1 - Mechanical and tribological properties of diamond-like carbon films prepared on steel by ECR-CVD process

AU - Li, K. Y.

AU - Zhou, Z. F.

AU - Chan, C. Y.

AU - Bello, I.

AU - Lee, C. S.

AU - Lee, S. T.

PY - 2001/9

Y1 - 2001/9

N2 - Diamond-like carbon (DLC) films were prepared on AISI 440C steel substrates at room temperature by the electron cyclotron resonance chemical vapor deposition (ECR-CVD) process in C2H2/Ar plasma under different conditions. In order to prevent the inter-diffusion of carbon and improve the adhesion strength of DLC films, functionally gradient Ti/TiN/TiCN/TiC supporting underlayers were deposited on the steel substrates in advance. Using the designed interfacial transition layers, relatively thick DLC films (1-2 μm) were successfully prepared on the steel substrates without delamination. By optimizing the deposition parameters, DLC films with hardness up to 28 GPa and friction coefficients lower than 0.15 against the 100Cr6 steel ball were obtained. In addition, the specific wear rates of the films were found to be extremely low (~ 10-17 m3/Nm). The friction-induced graphitization mechanism of DLC was confirmed by micro-Raman analysis. © 2001 Elsevier Science B.V. All rights reserved.

AB - Diamond-like carbon (DLC) films were prepared on AISI 440C steel substrates at room temperature by the electron cyclotron resonance chemical vapor deposition (ECR-CVD) process in C2H2/Ar plasma under different conditions. In order to prevent the inter-diffusion of carbon and improve the adhesion strength of DLC films, functionally gradient Ti/TiN/TiCN/TiC supporting underlayers were deposited on the steel substrates in advance. Using the designed interfacial transition layers, relatively thick DLC films (1-2 μm) were successfully prepared on the steel substrates without delamination. By optimizing the deposition parameters, DLC films with hardness up to 28 GPa and friction coefficients lower than 0.15 against the 100Cr6 steel ball were obtained. In addition, the specific wear rates of the films were found to be extremely low (~ 10-17 m3/Nm). The friction-induced graphitization mechanism of DLC was confirmed by micro-Raman analysis. © 2001 Elsevier Science B.V. All rights reserved.

KW - Chemical vapour deposition (CVD)

KW - Diamond-like carbon (DLC)

KW - Electron cyclotron resonance (ECR)

KW - Friction

KW - Steel

KW - Wear

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U2 - 10.1016/S0925-9635(01)00459-9

DO - 10.1016/S0925-9635(01)00459-9

M3 - RGC 21 - Publication in refereed journal

SN - 0925-9635

VL - 10

SP - 1855

EP - 1861

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 9-10

ER -

Mechanical and tribological properties of diamond-like carbon films prepared on steel by ECR-CVD process

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Research Keywords

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