MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS

Habiba Begum; Abid Ali; Joshua En-Yuan Lee

doi:10.1109/TRANSDUCERS.2019.8808188

MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS

Habiba Begum^*, Abid Ali, Joshua En-Yuan Lee

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

5 Citations (Scopus)

Abstract

We present, for the first time, mass sensitivity measurements of a novel resonant mode based on a disk resonator that delivers the one of the highest Q-factors among resonators tested in liquid (Q of 362). The mode of interest is referred to as the Button-like (BL) mode as its associated lateral strain profile resembles a shirt button. In the context of mass sensing, the high Q-factor of the BL mode enhances mass resolution. Its motional resistance (R_m) in water is 5.3kΩ, which greatly eases the difficulty in designing control circuits. In this paper, we measured the mass sensitivity of the device by depositing chrome (Cr) on the bottom surface of the device through a back cavity. The resonator has a measured mass sensitivity of 17.2ppm/ng for uniformly deposited mass on the resonator’s surface.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators & Microsystems and Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII)
Publisher	IEEE
Pages	1886-1889
ISBN (Electronic)	9781538681046, 9781728120072
ISBN (Print)	9781538681053
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808188
Publication status	Published - Jun 2019
Event	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Estrel Congress Center, Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019 http://www.transducers-eurosensors2019.org

Publication series

Name	International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors, TRANSDUCERS and EUROSENSORS
ISSN (Print)	2167-0013
ISSN (Electronic)	2167-0021

Conference

Conference	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Country/Territory	Germany
City	Berlin
Period	23/06/19 → 27/06/19
Internet address	http://www.transducers-eurosensors2019.org

Research Keywords

button-like
liquid phase
mass sensor
Micromechanical resonators
piezoelectric

Access Output

10.1109/TRANSDUCERS.2019.8808188

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

Begum, H., Ali, A., & Lee, J. E.-Y. (2019). MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS. In 2019 20th International Conference on Solid-State Sensors, Actuators & Microsystems and Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII) (pp. 1886-1889). Article M3P.104 (International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors, TRANSDUCERS and EUROSENSORS). IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808188

Begum, Habiba ; Ali, Abid ; Lee, Joshua En-Yuan. / MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS. 2019 20th International Conference on Solid-State Sensors, Actuators & Microsystems and Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII). IEEE, 2019. pp. 1886-1889 (International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors, TRANSDUCERS and EUROSENSORS).

@inproceedings{7ab7bc1d21e743b7a22a85066739ae29,

title = "MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS",

abstract = "We present, for the first time, mass sensitivity measurements of a novel resonant mode based on a disk resonator that delivers the one of the highest Q-factors among resonators tested in liquid (Q of 362). The mode of interest is referred to as the Button-like (BL) mode as its associated lateral strain profile resembles a shirt button. In the context of mass sensing, the high Q-factor of the BL mode enhances mass resolution. Its motional resistance (Rm) in water is 5.3kΩ, which greatly eases the difficulty in designing control circuits. In this paper, we measured the mass sensitivity of the device by depositing chrome (Cr) on the bottom surface of the device through a back cavity. The resonator has a measured mass sensitivity of 17.2ppm/ng for uniformly deposited mass on the resonator{\textquoteright}s surface.",

keywords = "button-like, liquid phase, mass sensor, Micromechanical resonators, piezoelectric",

author = "Habiba Begum and Abid Ali and Lee, {Joshua En-Yuan}",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808188",

language = "English",

isbn = "9781538681053",

series = "International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors, TRANSDUCERS and EUROSENSORS",

publisher = "IEEE",

pages = "1886--1889",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators & Microsystems and Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII)",

address = "United States",

note = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) ; Conference date: 23-06-2019 Through 27-06-2019",

url = "http://www.transducers-eurosensors2019.org",

}

Begum, H , Ali, A & Lee, JE-Y 2019, MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS. in 2019 20th International Conference on Solid-State Sensors, Actuators & Microsystems and Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII)., M3P.104, International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors, TRANSDUCERS and EUROSENSORS, IEEE, pp. 1886-1889, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808188

MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS. / Begum, Habiba ; Ali, Abid ; Lee, Joshua En-Yuan.
2019 20th International Conference on Solid-State Sensors, Actuators & Microsystems and Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII). IEEE, 2019. p. 1886-1889 M3P.104 (International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors, TRANSDUCERS and EUROSENSORS).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS

AU - Begum, Habiba

AU - Ali, Abid

AU - Lee, Joshua En-Yuan

PY - 2019/6

Y1 - 2019/6

N2 - We present, for the first time, mass sensitivity measurements of a novel resonant mode based on a disk resonator that delivers the one of the highest Q-factors among resonators tested in liquid (Q of 362). The mode of interest is referred to as the Button-like (BL) mode as its associated lateral strain profile resembles a shirt button. In the context of mass sensing, the high Q-factor of the BL mode enhances mass resolution. Its motional resistance (Rm) in water is 5.3kΩ, which greatly eases the difficulty in designing control circuits. In this paper, we measured the mass sensitivity of the device by depositing chrome (Cr) on the bottom surface of the device through a back cavity. The resonator has a measured mass sensitivity of 17.2ppm/ng for uniformly deposited mass on the resonator’s surface.

AB - We present, for the first time, mass sensitivity measurements of a novel resonant mode based on a disk resonator that delivers the one of the highest Q-factors among resonators tested in liquid (Q of 362). The mode of interest is referred to as the Button-like (BL) mode as its associated lateral strain profile resembles a shirt button. In the context of mass sensing, the high Q-factor of the BL mode enhances mass resolution. Its motional resistance (Rm) in water is 5.3kΩ, which greatly eases the difficulty in designing control circuits. In this paper, we measured the mass sensitivity of the device by depositing chrome (Cr) on the bottom surface of the device through a back cavity. The resonator has a measured mass sensitivity of 17.2ppm/ng for uniformly deposited mass on the resonator’s surface.

KW - button-like

KW - liquid phase

KW - mass sensor

KW - Micromechanical resonators

KW - piezoelectric

UR - http://www.scopus.com/inward/record.url?scp=85071928629&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85071928629&origin=recordpage

U2 - 10.1109/TRANSDUCERS.2019.8808188

DO - 10.1109/TRANSDUCERS.2019.8808188

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781538681053

T3 - International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors, TRANSDUCERS and EUROSENSORS

SP - 1886

EP - 1889

BT - 2019 20th International Conference on Solid-State Sensors, Actuators & Microsystems and Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII)

PB - IEEE

T2 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Y2 - 23 June 2019 through 27 June 2019

ER -

Begum H , Ali A , Lee JEY. MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS. In 2019 20th International Conference on Solid-State Sensors, Actuators & Microsystems and Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII). IEEE. 2019. p. 1886-1889. M3P.104. (International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors, TRANSDUCERS and EUROSENSORS). doi: 10.1109/TRANSDUCERS.2019.8808188

MASS SENSITIVITY MEASUREMENTS OF A NOVEL HIGH Q-FACTOR DISK RESONATOR FOR LIQUID-PHASE SENSING APPLICATIONS

Abstract

Publication series

Conference

Research Keywords

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

Cite this