Significant efforts have been devoted to enhancing the sensitivity and working range of flexible pressure sensors to improve the precise measurement of subtle variations in pressure over a wide detection spectrum. However, achieving sensitivities exceeding 1000 kPa⁻¹ while maintaining a pressure working range over 100 kPa is still challenging because of the limited intrinsic properties of soft matrix materials. Here, we report a magnetic field-induced porous elastomer with micropillar arrays (MPAs) as sensing materials and a well-patterned nickel fabric as an electrode. The developed sensor exhibits an ultrahigh sensitivity of 10,268 kPa⁻¹ (0.6–170 kPa) with a minimum detection pressure of 0.25 Pa and a fast response time of 3 ms because of the unique structure of the MPAs and the textured morphology of the electrode. The porous elastomer provides an extended working range of up to 500 kPa with long-time durability. The sophisticated sensor system coupled with an integrated wireless recharging system comprising a flexible supercapacitor and inductive coils for transmission achieves excellent performance. Thus, a diverse range of practical applications requiring a low-to-high pressure range sensing can be developed. Our strategy, which combines a microstructured high-performance sensor device with a wireless recharging system, provides a basis for creating next-generation flexible electronics.

為實現在寬感知範圍內對微小壓力變化的精確測量, 提高柔性壓力感測器的靈敏度和工作範圍顯得尤為迫切. 然而, 由於柔性感測器所使用的軟基質材料的固有局限, 實現超過100 kPa工作範圍同時維持1000 kPa⁻¹ 以上的靈敏度仍然是一項挑戰. 本文報導了一種磁誘導的多孔彈性體(PDMS), 分別以微柱陣列(MPA)作為傳感材料和具有編織結構的導電鎳作為電極. 由於MPA的獨特結構和電極的織構形態, 所開發的傳感器具有10,268 kPa⁻¹ (0.6–170 kPa 範圍內) 的超高靈敏度, 高達500 kPa的工作範圍, 並具有長期耐用性. 並實現了最小0.25 Pa的檢測壓力和3 ms的回應時間. 此外, 將柔性感測器、柔性超級電容器和感應線圈進行一體化集成, 實現了對感測器的無線能量傳輸, 並在低壓至高壓範圍內對傳感實際應用能力進行了測試. 本項研究工作將具有微結構的高性能感測器與無線充電系統結合在一起, 為開發下一代柔性電子產品提供了一種新穎的方法.