Luminescence and SiC Formation from C and H Implanted Silicon

Z. An; R.K.Y. Fu; P.  Chen; W.L. Liu; P.K. Chu; C.L. Lin

Luminescence and SiC Formation from C and H Implanted Silicon

Z. An
, R.K.Y. Fu
, P. Chen
, W.L. Liu
, P.K. Chu
, C.L. Lin

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Pages	76
Publication status	Published - Apr 2003
Event	30th International Conference on Metallurgical Coatings and Thin Films (ICMCTF2003) - Town and Country Hotel, San Diego, United States Duration: 28 Apr 2003 → 2 May 2003 https://avssymposium.org/ICMCTF2003/Meetings/ProgramSchedule

Conference

Conference	30th International Conference on Metallurgical Coatings and Thin Films (ICMCTF2003)
Abbreviated title	ICMCTF 2003
Place	United States
City	San Diego
Period	28/04/03 → 2/05/03
Internet address	https://avssymposium.org/ICMCTF2003/Meetings/ProgramSchedule

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@conference{eeeed2dcb013493a9b9cff96b9d4751e,

title = "Luminescence and SiC Formation from C and H Implanted Silicon",

author = "Z. An and R.K.Y. Fu and P. Chen and W.L. Liu and P.K. Chu and C.L. Lin",

year = "2003",

month = apr,

language = "English",

pages = "76",

note = "30th International Conference on Metallurgical Coatings and Thin Films (ICMCTF2003), ICMCTF 2003 ; Conference date: 28-04-2003 Through 02-05-2003",

url = "https://avssymposium.org/ICMCTF2003/Meetings/ProgramSchedule",

}

TY - CONF

T1 - Luminescence and SiC Formation from C and H Implanted Silicon

AU - An, Z.

AU - Fu, R.K.Y.

AU - Chen, P.

AU - Liu, W.L.

AU - Chu, P.K.

AU - Lin, C.L.

PY - 2003/4

Y1 - 2003/4

M3 - RGC 32 - Refereed conference paper (without host publication)

SP - 76

T2 - 30th International Conference on Metallurgical Coatings and Thin Films (ICMCTF2003)

Y2 - 28 April 2003 through 2 May 2003

ER -