Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Author(s)

Original language	English
Title of host publication	2002 INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS - PROGRAM AND ABSTRACTS
Pages	28
Publication status	Published - Apr 2002

Title	International Conference on Metallurgical Coatings and Thin Films 2002
Location	Town and Country Hotel
Place	United States
City	San Diego
Period	22 - 26 April 2002

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Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(ae92acdd-9701-415e-865c-5683b7aa81c8).html

Research Unit(s) information for this publication is provided by the author(s) concerned.

[ RIS ] [ BibTeX ]

Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition. / Gan, K. Y.; Tang, B. Y.; Wang, X. F. et al.
2002 INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS - PROGRAM AND ABSTRACTS. 2002. p. 28.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Gan, KY, Tang, BY, Wang, XF & Chu, PK 2002, Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition. in 2002 INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS - PROGRAM AND ABSTRACTS. pp. 28, International Conference on Metallurgical Coatings and Thin Films 2002, San Diego, California, United States, 22/04/02.

Gan, K. Y., Tang, B. Y., Wang, X. F., & Chu, P. K. (2002). Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition. In 2002 INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS - PROGRAM AND ABSTRACTS (pp. 28)

Gan KY, Tang BY, Wang XF, Chu PK. Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition. In 2002 INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS - PROGRAM AND ABSTRACTS. 2002. p. 28

Gan, K. Y. ; Tang, B. Y. ; Wang, X. F. et al. / Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition. 2002 INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS - PROGRAM AND ABSTRACTS. 2002. pp. 28