Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition

K. Y. Gan; B. Y. Tang; X. F. Wang; P. K. Chu

Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition

K. Y. Gan
, B. Y. Tang
, X. F. Wang
, P. K. Chu

Department of Physics

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	2002 INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS - PROGRAM AND ABSTRACTS
Pages	28
Publication status	Published - Apr 2002
Event	International Conference on Metallurgical Coatings and Thin Films 2002 - Town and Country Hotel, San Diego, United States Duration: 22 Apr 2002 → 26 Apr 2002

Conference

Conference	International Conference on Metallurgical Coatings and Thin Films 2002
Abbreviated title	ICMCTF 2002
Place	United States
City	San Diego
Period	22/04/02 → 26/04/02

Bibliographical note

Research Unit(s) information for this publication is provided by the author(s) concerned.

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Cite this

@inproceedings{ae92acdd9701415e865c5683b7aa81c8,

title = "Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition",

author = "Gan, \{K. Y.\} and Tang, \{B. Y.\} and Wang, \{X. F.\} and Chu, \{P. K.\}",

note = "Research Unit(s) information for this publication is provided by the author(s) concerned.; International Conference on Metallurgical Coatings and Thin Films 2002, ICMCTF 2002 ; Conference date: 22-04-2002 Through 26-04-2002",

year = "2002",

month = apr,

language = "English",

pages = "28",

booktitle = "2002 INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS - PROGRAM AND ABSTRACTS",

}

Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition. / Gan, K. Y.; Tang, B. Y.; Wang, X. F. et al.
2002 INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS - PROGRAM AND ABSTRACTS. 2002. p. 28.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Low-Voltage Solid State Modulator for Industrial Plasma Immersion Ion Implantation and Deposition

AU - Gan, K. Y.

AU - Tang, B. Y.

AU - Wang, X. F.

AU - Chu, P. K.

N1 - Research Unit(s) information for this publication is provided by the author(s) concerned.

PY - 2002/4

Y1 - 2002/4

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 28

BT - 2002 INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS - PROGRAM AND ABSTRACTS

T2 - International Conference on Metallurgical Coatings and Thin Films 2002

Y2 - 22 April 2002 through 26 April 2002

ER -