Low energy ions originating from the rise and fall time of non-ideal plasma immersion ion implantation voltage pulses

Research output: Conference Papers › RGC 33 - Other conference paper › peer-review

Original language	English
Publication status	Published - Sept 2002
Event	14th International Conference on Ion Implantation Technology - Taos, United States Duration: 22 Sept 2002 → 27 Sept 2002

Conference	14th International Conference on Ion Implantation Technology
Abbreviated title	IIT 2002
Place	United States
City	Taos
Period	22/09/02 → 27/09/02

Other Access Options

@conference{6397150cbf824b85b0f3a22e10aa8114,

title = "Low energy ions originating from the rise and fall time of non-ideal plasma immersion ion implantation voltage pulses",

author = "Kwok, \{Dixon T. K.\} and Chu, \{Paul K.\}",

year = "2002",

month = sep,

language = "English",

note = "14th International Conference on Ion Implantation Technology, IIT 2002 ; Conference date: 22-09-2002 Through 27-09-2002",

}