Low-Cost Wet-Etching Method to Fabricate a Robust THz Tri-Layer Polarizer with a High Extinction Ratio

Zhe Huang; Hau Ping Chan; Emma Pickwell-MacPherson; Edward P. J. Parrott

doi:10.1109/CSRSWTC52801.2021.9631600

Low-Cost Wet-Etching Method to Fabricate a Robust THz Tri-Layer Polarizer with a High Extinction Ratio

Zhe Huang
, Hau Ping Chan
, Emma Pickwell-MacPherson
, Edward P. J. Parrott

Department of Electrical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

1 Citation (Scopus)

Abstract

There is a growing interest to fabricate robust terahertz (THz) multilayer components in various spectroscopy and sensing systems using standard manufacturing technologies. This paper proposes a low-cost wet-etching fabrication process to realize a THz thin film polarizer with trilayer wire grids. The measured extinction ratio has an average of 60dB over 0 - 2THz.

Original language	English
Title of host publication	Proceedings of the 2021 Cross Strait Radio Science and Wireless Technology Conference
Publisher	IEEE
Pages	374-376
ISBN (Electronic)	9781665432436
ISBN (Print)	9781665432443
DOIs	https://doi.org/10.1109/CSRSWTC52801.2021.9631600
Publication status	Published - 2021
Event	2021 Cross Strait Radio Science and Wireless Technology Conference - Sentosa Hotel Shenzhen Emerald Branch (Live & Virtual), Shenzhen, China Duration: 11 Oct 2021 → 13 Oct 2021 http://www.ee.cityu.edu.hk/skltmw/csrswtc2021/

Publication series

Name	Proceedings of the Cross Strait Radio Science and Wireless Technology Conference
ISSN (Print)	2378-1297
ISSN (Electronic)	2377-8512

Conference

Conference	2021 Cross Strait Radio Science and Wireless Technology Conference
Abbreviated title	CSRSWTC 2021
Place	China
City	Shenzhen
Period	11/10/21 → 13/10/21
Internet address	http://www.ee.cityu.edu.hk/skltmw/csrswtc2021/

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Research Keywords

terahertz (THz)
wet-etching method
multilayer structure
thin-film component
polarizer

Access Output

10.1109/CSRSWTC52801.2021.9631600

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Huang, Z., Chan, H. P., Pickwell-MacPherson, E., & Parrott, E. P. J. (2021). Low-Cost Wet-Etching Method to Fabricate a Robust THz Tri-Layer Polarizer with a High Extinction Ratio. In Proceedings of the 2021 Cross Strait Radio Science and Wireless Technology Conference (pp. 374-376). (Proceedings of the Cross Strait Radio Science and Wireless Technology Conference). IEEE. https://doi.org/10.1109/CSRSWTC52801.2021.9631600

@inproceedings{df504f1585944603ba1a6fa975bb47ae,

title = "Low-Cost Wet-Etching Method to Fabricate a Robust THz Tri-Layer Polarizer with a High Extinction Ratio",

abstract = "There is a growing interest to fabricate robust terahertz (THz) multilayer components in various spectroscopy and sensing systems using standard manufacturing technologies. This paper proposes a low-cost wet-etching fabrication process to realize a THz thin film polarizer with trilayer wire grids. The measured extinction ratio has an average of 60dB over 0 - 2THz.",

keywords = "terahertz (THz), wet-etching method, multilayer structure, thin-film component, polarizer",

author = "Zhe Huang and Chan, \{Hau Ping\} and Emma Pickwell-MacPherson and Parrott, \{Edward P. J.\}",

year = "2021",

doi = "10.1109/CSRSWTC52801.2021.9631600",

language = "English",

isbn = "9781665432443",

series = "Proceedings of the Cross Strait Radio Science and Wireless Technology Conference",

publisher = "IEEE",

pages = "374--376",

booktitle = "Proceedings of the 2021 Cross Strait Radio Science and Wireless Technology Conference",

address = "United States",

note = "2021 Cross Strait Radio Science and Wireless Technology Conference, CSRSWTC 2021 ; Conference date: 11-10-2021 Through 13-10-2021",

url = "http://www.ee.cityu.edu.hk/skltmw/csrswtc2021/",

}

Huang, Z, Chan, HP, Pickwell-MacPherson, E & Parrott, EPJ 2021, Low-Cost Wet-Etching Method to Fabricate a Robust THz Tri-Layer Polarizer with a High Extinction Ratio. in Proceedings of the 2021 Cross Strait Radio Science and Wireless Technology Conference. Proceedings of the Cross Strait Radio Science and Wireless Technology Conference, IEEE, pp. 374-376, 2021 Cross Strait Radio Science and Wireless Technology Conference, Shenzhen, China, 11/10/21. https://doi.org/10.1109/CSRSWTC52801.2021.9631600

Low-Cost Wet-Etching Method to Fabricate a Robust THz Tri-Layer Polarizer with a High Extinction Ratio. / Huang, Zhe; Chan, Hau Ping; Pickwell-MacPherson, Emma et al.
Proceedings of the 2021 Cross Strait Radio Science and Wireless Technology Conference. IEEE, 2021. p. 374-376 (Proceedings of the Cross Strait Radio Science and Wireless Technology Conference).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Low-Cost Wet-Etching Method to Fabricate a Robust THz Tri-Layer Polarizer with a High Extinction Ratio

AU - Huang, Zhe

AU - Chan, Hau Ping

AU - Pickwell-MacPherson, Emma

AU - Parrott, Edward P. J.

PY - 2021

Y1 - 2021

N2 - There is a growing interest to fabricate robust terahertz (THz) multilayer components in various spectroscopy and sensing systems using standard manufacturing technologies. This paper proposes a low-cost wet-etching fabrication process to realize a THz thin film polarizer with trilayer wire grids. The measured extinction ratio has an average of 60dB over 0 - 2THz.

AB - There is a growing interest to fabricate robust terahertz (THz) multilayer components in various spectroscopy and sensing systems using standard manufacturing technologies. This paper proposes a low-cost wet-etching fabrication process to realize a THz thin film polarizer with trilayer wire grids. The measured extinction ratio has an average of 60dB over 0 - 2THz.

KW - terahertz (THz)

KW - wet-etching method

KW - multilayer structure

KW - thin-film component

KW - polarizer

UR - https://www.scopus.com/pages/publications/85123787324

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85123787324&origin=recordpage

U2 - 10.1109/CSRSWTC52801.2021.9631600

DO - 10.1109/CSRSWTC52801.2021.9631600

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781665432443

T3 - Proceedings of the Cross Strait Radio Science and Wireless Technology Conference

SP - 374

EP - 376

BT - Proceedings of the 2021 Cross Strait Radio Science and Wireless Technology Conference

PB - IEEE

T2 - 2021 Cross Strait Radio Science and Wireless Technology Conference

Y2 - 11 October 2021 through 13 October 2021

ER -

Huang Z, Chan HP, Pickwell-MacPherson E, Parrott EPJ. Low-Cost Wet-Etching Method to Fabricate a Robust THz Tri-Layer Polarizer with a High Extinction Ratio. In Proceedings of the 2021 Cross Strait Radio Science and Wireless Technology Conference. IEEE. 2021. p. 374-376. (Proceedings of the Cross Strait Radio Science and Wireless Technology Conference). Epub 2021 Dec 13. doi: 10.1109/CSRSWTC52801.2021.9631600

Low-Cost Wet-Etching Method to Fabricate a Robust THz Tri-Layer Polarizer with a High Extinction Ratio

Abstract

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UN SDGs

Research Keywords

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