Lorentz Force Magnetic Sensors based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators

Sagnik Ghosh; Joshua E.-Y. Lee

doi:10.1109/NEMS.2018.8556900

Lorentz Force Magnetic Sensors based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators

Sagnik Ghosh, Joshua E.-Y. Lee^*

^*Corresponding author for this work

Research output: Conference Papers › RGC 31A - Invited conference paper (refereed items) › Yes › peer-review

1 Citation (Scopus)

Abstract

This paper describes recent results on realizing of a new class of magnetic sensors based on piezoelectric Aluminum Nitride on Silicon (AlN-on-Si) resonators that are actuated by a magnetic field-induced Lorentz force. The proposed approach exploits the efficient electromechanical coupling that is afforded by piezoelectric transduction to enhance the sensitivity of the electrical readout. This enhancement in the coupling allows for the device to operate outside of vacuum. We present 4 different device concepts herein with the aim to illustrate the possibility of implementing three-axis detection on a single chip based on the proposed approach.

Original language	English
Pages	288-291
DOIs	https://doi.org/10.1109/NEMS.2018.8556900
Publication status	Published - Apr 2018
Event	13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018) - Grand Hyatt Singapore, Singapore Duration: 22 Apr 2018 → 26 Apr 2018

Conference

Conference	13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018)
Place	Singapore
Period	22/04/18 → 26/04/18

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@conference{a7f4ed63e5e141a3a517d550c7ab0fa7,

title = "Lorentz Force Magnetic Sensors based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators",

abstract = "This paper describes recent results on realizing of a new class of magnetic sensors based on piezoelectric Aluminum Nitride on Silicon (AlN-on-Si) resonators that are actuated by a magnetic field-induced Lorentz force. The proposed approach exploits the efficient electromechanical coupling that is afforded by piezoelectric transduction to enhance the sensitivity of the electrical readout. This enhancement in the coupling allows for the device to operate outside of vacuum. We present 4 different device concepts herein with the aim to illustrate the possibility of implementing three-axis detection on a single chip based on the proposed approach.",

author = "Sagnik Ghosh and Lee, {Joshua E.-Y.}",

year = "2018",

month = apr,

doi = "10.1109/NEMS.2018.8556900",

language = "English",

pages = "288--291",

note = "13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018) ; Conference date: 22-04-2018 Through 26-04-2018",

}

Lorentz Force Magnetic Sensors based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators. / Ghosh, Sagnik ; Lee, Joshua E.-Y.
2018. 288-291 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018), Singapore.

Research output: Conference Papers › RGC 31A - Invited conference paper (refereed items) › Yes › peer-review

TY - CONF

T1 - Lorentz Force Magnetic Sensors based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators

AU - Ghosh, Sagnik

AU - Lee, Joshua E.-Y.

PY - 2018/4

Y1 - 2018/4

N2 - This paper describes recent results on realizing of a new class of magnetic sensors based on piezoelectric Aluminum Nitride on Silicon (AlN-on-Si) resonators that are actuated by a magnetic field-induced Lorentz force. The proposed approach exploits the efficient electromechanical coupling that is afforded by piezoelectric transduction to enhance the sensitivity of the electrical readout. This enhancement in the coupling allows for the device to operate outside of vacuum. We present 4 different device concepts herein with the aim to illustrate the possibility of implementing three-axis detection on a single chip based on the proposed approach.

AB - This paper describes recent results on realizing of a new class of magnetic sensors based on piezoelectric Aluminum Nitride on Silicon (AlN-on-Si) resonators that are actuated by a magnetic field-induced Lorentz force. The proposed approach exploits the efficient electromechanical coupling that is afforded by piezoelectric transduction to enhance the sensitivity of the electrical readout. This enhancement in the coupling allows for the device to operate outside of vacuum. We present 4 different device concepts herein with the aim to illustrate the possibility of implementing three-axis detection on a single chip based on the proposed approach.

UR - http://www.scopus.com/inward/record.url?scp=85060272493&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85060272493&origin=recordpage

U2 - 10.1109/NEMS.2018.8556900

DO - 10.1109/NEMS.2018.8556900

M3 - RGC 31A - Invited conference paper (refereed items)

SP - 288

EP - 291

T2 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018)

Y2 - 22 April 2018 through 26 April 2018

ER -

Lorentz Force Magnetic Sensors based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators

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