Long-Period Waveguide Gratings

H. C. Tsoi; W. H. Wong; E. Y. B. Pun

doi:10.1109/COS.2003.1278185

Long-Period Waveguide Gratings

H. C. Tsoi, W. H. Wong, E. Y. B. Pun

Department of Electrical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

1 Citation (Scopus)

Abstract

Long period waveguide gratings (LPWG) based on a low-loss negative tone epoxy Novolak resin polymer have been fabricated on SiO₂/Si substrate using standard cleanroom processes: UV photolithography and reactive ion etching. A maximum attenuation of -18dB and a minimum 3 dB bandwidth of 6nm were measured, and the grating length is as short as 1 cm.

Original language	English
Title of host publication	PROCEEDINGS OF THE SIXTH CHINESE OPTOELECTRONICS SYMPOSIUM
Editors	H. S. Kwok, K. T. Chan
Publisher	IEEE
Pages	140-143
ISBN (Print)	0780378873, 9780780378872
DOIs	https://doi.org/10.1109/COS.2003.1278185
Publication status	Published - Sept 2003
Event	6th Chinese Opto-Electronics Symposium (COES'03) - Hong Kong University of Science and Technology, Hong Kong, China Duration: 12 Sept 2003 → 14 Sept 2003

Conference

Conference	6th Chinese Opto-Electronics Symposium (COES'03)
Place	Hong Kong, China
Period	12/09/03 → 14/09/03

Research Keywords

Erbium-doped fiber amplifier
Etching
Gratings
Lithography
Optical fiber filters
Optical polymers
Optical refraction
Optical surface waves
Optical variables control
Optical waveguides

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@inproceedings{90516a371c444332bf4824387b6d3789,

title = "Long-Period Waveguide Gratings",

abstract = "Long period waveguide gratings (LPWG) based on a low-loss negative tone epoxy Novolak resin polymer have been fabricated on SiO2/Si substrate using standard cleanroom processes: UV photolithography and reactive ion etching. A maximum attenuation of -18dB and a minimum 3 dB bandwidth of 6nm were measured, and the grating length is as short as 1 cm.",

keywords = "Erbium-doped fiber amplifier, Etching, Gratings, Lithography, Optical fiber filters, Optical polymers, Optical refraction, Optical surface waves, Optical variables control, Optical waveguides",

author = "Tsoi, {H. C.} and Wong, {W. H.} and Pun, {E. Y. B.}",

year = "2003",

month = sep,

doi = "10.1109/COS.2003.1278185",

language = "English",

isbn = "0780378873",

pages = "140--143",

editor = "Kwok, {H. S.} and Chan, {K. T. }",

booktitle = "PROCEEDINGS OF THE SIXTH CHINESE OPTOELECTRONICS SYMPOSIUM",

publisher = "IEEE",

address = "United States",

note = "6th Chinese Opto-Electronics Symposium (COES'03) ; Conference date: 12-09-2003 Through 14-09-2003",

}

TY - GEN

T1 - Long-Period Waveguide Gratings

AU - Tsoi, H. C.

AU - Wong, W. H.

AU - Pun, E. Y. B.

PY - 2003/9

Y1 - 2003/9

N2 - Long period waveguide gratings (LPWG) based on a low-loss negative tone epoxy Novolak resin polymer have been fabricated on SiO2/Si substrate using standard cleanroom processes: UV photolithography and reactive ion etching. A maximum attenuation of -18dB and a minimum 3 dB bandwidth of 6nm were measured, and the grating length is as short as 1 cm.

AB - Long period waveguide gratings (LPWG) based on a low-loss negative tone epoxy Novolak resin polymer have been fabricated on SiO2/Si substrate using standard cleanroom processes: UV photolithography and reactive ion etching. A maximum attenuation of -18dB and a minimum 3 dB bandwidth of 6nm were measured, and the grating length is as short as 1 cm.

KW - Erbium-doped fiber amplifier

KW - Etching

KW - Gratings

KW - Lithography

KW - Optical fiber filters

KW - Optical polymers

KW - Optical refraction

KW - Optical surface waves

KW - Optical variables control

KW - Optical waveguides

UR - http://www.scopus.com/inward/record.url?scp=84945547062&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84945547062&origin=recordpage

U2 - 10.1109/COS.2003.1278185

DO - 10.1109/COS.2003.1278185

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0780378873

SN - 9780780378872

SP - 140

EP - 143

BT - PROCEEDINGS OF THE SIXTH CHINESE OPTOELECTRONICS SYMPOSIUM

A2 - Kwok, H. S.

A2 - Chan, K. T.

PB - IEEE

T2 - 6th Chinese Opto-Electronics Symposium (COES'03)

Y2 - 12 September 2003 through 14 September 2003

ER -

Long-Period Waveguide Gratings

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