LIFT-OFF CELL LITHOGRAPHY FOR HIGH EFFICIENCY AND CLEAN BACKGROUND CELL PATTERNING

Research output: Conference Papers (RGC: 31A, 31B, 32, 33)33_Other conference paperNot applicablepeer-review

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Author(s)

  • Cong Wu
  • Xiongfeng Zhu
  • Tianxing Man
  • Pei-Yu Chiou

Related Research Unit(s)

Detail(s)

Original languageEnglish
Publication statusPresented - 12 Nov 2018

Conference

Title22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
LocationKaohsiung Exhibition Center
PlaceTaiwan
CityKaohsiung
Period11 - 15 November 2018

Bibliographic Note

Information for this record is supplemented by the author(s) concerned.

Citation Format(s)

LIFT-OFF CELL LITHOGRAPHY FOR HIGH EFFICIENCY AND CLEAN BACKGROUND CELL PATTERNING. / Wu, Cong; Zhu, Xiongfeng; Man, Tianxing; Chiou, Pei-Yu.

2018. 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018, Kaohsiung, Taiwan.

Research output: Conference Papers (RGC: 31A, 31B, 32, 33)33_Other conference paperNot applicablepeer-review