Abstract
Thin films of lithium cobalt oxide were deposited on Pt or Pt/Ti/quartz glass substrates by radio frequency (RF) magnetron sputtering at the substrate temperatures from room temperature to 500 °C. As the substrate temperature increased, the film structure changed from amorphous structure to crystallinity with a strong (003) texture as characterized by X-ray diffraction. The surface morphology and cross-section were observed using scanning electron microscopy. It was found that the films tended to crack at a high substrate temperature. Charge-discharge tests of these films were conducted and compared. The different electrochemical characteristics of these films were attributed to the modified crystallography, morphology, and thermal stress. The LiCoO2 film deposited at 400 °C showed a well-defined 4.0 V voltage plateau on charge and a 3.9 V plateau on discharge, and delivered 54.5 μAh/cm2 μm at the first discharge capacity, with good cycling performance, giving evidence that such films could be used as the thin film cathodes for lithium microbatteries. © 2009 Elsevier B.V. All rights reserved.
| Original language | English |
|---|---|
| Pages (from-to) | 1710-1714 |
| Journal | Surface and Coatings Technology |
| Volume | 204 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 25 Feb 2010 |
| Externally published | Yes |
Bibliographical note
Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to <a href="mailto:[email protected]">[email protected]</a>.Funding
This research was sponsored by the Natural Science Foundation of Hubei Province (No. 2006ABA317 ), and an Australian Research Council (ARC) Discovery Project (No. DP0878611 ).
Research Keywords
- LiCoO2
- Lithium microbatteries
- RF sputtering
- Thin film
