Lamé Mode MEMS Resonators

Joshua E-Y Lee

doi:10.1007/978-94-017-9780-1_101001

Lamé Mode MEMS Resonators

Joshua E-Y Lee

Department of Electrical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 12 - Chapter in an edited book (Author)

Original language	English
Title of host publication	Encyclopedia of Nanotechnology
Editors	Bharat Bhushan
Place of Publication	Netherlands
Publisher	Springer, Dordrecht
Pages	1731-1739
Edition	2
ISBN (Electronic)	978-94-017-9780-1
ISBN (Print)	978-94-017-9779-5
DOIs	https://doi.org/10.1007/978-94-017-9780-1_101001
Publication status	Published - 2016

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title = "Lam{\'e} Mode MEMS Resonators",

author = "Lee, \{Joshua E-Y\}",

year = "2016",

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language = "English",

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editor = "Bharat Bhushan",

booktitle = "Encyclopedia of Nanotechnology",

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edition = "2",

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AU - Lee, Joshua E-Y

PY - 2016

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U2 - 10.1007/978-94-017-9780-1_101001

DO - 10.1007/978-94-017-9780-1_101001

M3 - RGC 12 - Chapter in an edited book (Author)

SN - 978-94-017-9779-5

SP - 1731

EP - 1739

BT - Encyclopedia of Nanotechnology

A2 - Bhushan, Bharat

PB - Springer, Dordrecht

CY - Netherlands

ER -

Lamé Mode MEMS Resonators

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