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Ion Implantation of Cylindrical Bore Using Radio-Frequency Hollow Cathode Discharge

  • Xiubo Tian*
  • , Haifu Jiang
  • , Shiqin Yang
  • , Paul K. Chu
  • *Corresponding author for this work

    Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

    Abstract

    Radio-frequency hollow cathode discharge has gained more interest due to the characteristics of micro-size plasma source. It has proven to be very effective to treat local surface of the component. A radio-frequency hollow cathode system has been developed in our group. The cathode may be made of stainless steel, titanium alloy or tantalum alloy. The cathode is shielded using a water cooled electrode. In this paper the system was utilized to treat the inner wall of cylindrical bore. The diameter of the cylindrical bore ranged from 30 mm to 100 mm. The implantation voltage changed from 5 kV to 30 kV. The stainless steel samples were utilized to evaluate the effectiveness of the processes. The experimental results have demonstrated that the process has substantially improved the wear resistance and corrosion-resistance using nitrogen plasmas. The implantation dynamics monitored by a ring-shaped detector has also been presented.
    Original languageEnglish
    Title of host publicationProceedings of the 15th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-15)
    Pages26
    Publication statusPublished - 30 Sept 2007
    Event15th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-15) - Mumbai, India
    Duration: 30 Sept 20075 Oct 2007

    Conference

    Conference15th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-15)
    PlaceIndia
    CityMumbai
    Period30/09/075/10/07

    Research Keywords

    • Cathodic arc

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