Ion beam synthesized cobalt germanide alloy by metal vapor vacuum arc implantation

C. S. Lee; I. H. Wilson; W. Y. Cheung; Y. J. Chen; J. B. Xu; S. P. Wong

doi:10.1016/S0168-583X(98)00842-8

Author(s)

I. H. Wilson
W. Y. Cheung
Y. J. Chen
J. B. Xu
S. P. Wong

Detail(s)

Original language	English
Pages (from-to)	604-609
Journal / Publication	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	148
Issue number	1-4
Publication status	Published - 1999
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1016/S0168-583X(98)00842-8 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-0033513780&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(429040db-cd3a-4ed9-bd54-ddaa5cdd4bb5).html

Abstract

Germanide formation and evolution in Co-implanted germanium have been studied by θ-2θ X-ray-diffraction (XRD), atomic force microscopy (AFM) and the Rutherford backscattering spectrometry (RBS). A metal vapor vacuum arc (MEWA) ion source implanter operated at 60 kV was used to implant Co into Ge(100) wafers with doses ranging from 6×10¹⁴ to 6×10¹⁸ cm^-2, and mean current density being either 15 or 210 μA cm^-2. The sequence of phase formation was obtained by XRD. Dramatic cellular and columnar nanostructures were observed by AFM in the low and high mean current density samples, respectively. Information on the roughness was obtained. The degree of crystallinity and the thickness of the damaged layer were determined by RBS and ion channeling. The phase formation and evolution are discussed with respect to beam heating effect and the heat of formation. © 1999 Elsevier Science B.V. All rights reserved.

Research Area(s)

Atomic force microscopy, Cobalt germanide, Ion beam synthesis, Rutherford backscattering spectroscopy, X-ray diffraction

Citation Format(s)

[ RIS ] [ BibTeX ]

Ion beam synthesized cobalt germanide alloy by metal vapor vacuum arc implantation. / Lee, C. S.; Wilson, I. H.; Cheung, W. Y. et al.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 148, No. 1-4, 1999, p. 604-609.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Lee, CS, Wilson, IH, Cheung, WY, Chen, YJ, Xu, JB & Wong, SP 1999, 'Ion beam synthesized cobalt germanide alloy by metal vapor vacuum arc implantation', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 148, no. 1-4, pp. 604-609. https://doi.org/10.1016/S0168-583X(98)00842-8

Lee, C. S., Wilson, I. H., Cheung, W. Y., Chen, Y. J., Xu, J. B., & Wong, S. P. (1999). Ion beam synthesized cobalt germanide alloy by metal vapor vacuum arc implantation. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 148(1-4), 604-609. https://doi.org/10.1016/S0168-583X(98)00842-8

Lee CS, Wilson IH, Cheung WY, Chen YJ, Xu JB, Wong SP. Ion beam synthesized cobalt germanide alloy by metal vapor vacuum arc implantation. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 1999;148(1-4):604-609. doi: 10.1016/S0168-583X(98)00842-8

Lee, C. S. ; Wilson, I. H. ; Cheung, W. Y. et al. / Ion beam synthesized cobalt germanide alloy by metal vapor vacuum arc implantation. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 1999 ; Vol. 148, No. 1-4. pp. 604-609.