Ion-Beam-Based Nanofabrication, Materials Research Society Symposium Proceedings, Vol. 1020

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@book{2ce8cf3dce2448d7bf771abecc7b5ecc,

title = "Ion-Beam-Based Nanofabrication, Materials Research Society Symposium Proceedings, Vol. 1020",

keywords = "Nano-fabrication",

editor = "D ILA and J BAGLIN and N KISHIMOTO and CHU, \{Paul Kimho\}",

year = "2007",

language = "English",

publisher = "Materials Research Society",

address = "United States",

}

TY - BOOK

T1 - Ion-Beam-Based Nanofabrication, Materials Research Society Symposium Proceedings, Vol. 1020

A2 - ILA, D

A2 - BAGLIN, J

A2 - KISHIMOTO, N

A2 - CHU, Paul Kimho

PY - 2007

Y1 - 2007

KW - Nano-fabrication

M3 - RGC 14 - Edited book (Editor)

BT - Ion-Beam-Based Nanofabrication, Materials Research Society Symposium Proceedings, Vol. 1020

PB - Materials Research Society

CY - USA, Warrendale

ER -