Investigation of Plasma Potential and Pulse Discharge Characteristics in Enhanced Glow Discharge Plasma Immersion Ion Implantation

Liuhe LI, Qiu Yuan LU, Ricky K Y FU, Paul CHU

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - 31 Aug 2008
Event	16th International Conference on Ion Beam Modification of Materials - , Germany Duration: 31 Aug 2008 → 5 Sept 2008

Conference	16th International Conference on Ion Beam Modification of Materials
Country/Territory	Germany
Period	31/08/08 → 5/09/08

Other Access Options

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title = "Investigation of Plasma Potential and Pulse Discharge Characteristics in Enhanced Glow Discharge Plasma Immersion Ion Implantation",

author = "Liuhe LI and LU, {Qiu Yuan} and FU, {Ricky K Y} and Paul CHU",

year = "2008",

month = aug,

day = "31",

language = "English",

note = "16th International Conference on Ion Beam Modification of Materials ; Conference date: 31-08-2008 Through 05-09-2008",

}

Investigation of Plasma Potential and Pulse Discharge Characteristics in Enhanced Glow Discharge Plasma Immersion Ion Implantation. / LI, Liuhe; LU, Qiu Yuan; FU, Ricky K Y et al.
2008. Paper presented at 16th International Conference on Ion Beam Modification of Materials, Germany.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Investigation of Plasma Potential and Pulse Discharge Characteristics in Enhanced Glow Discharge Plasma Immersion Ion Implantation

AU - LI, Liuhe

AU - LU, Qiu Yuan

AU - FU, Ricky K Y

AU - CHU, Paul

PY - 2008/8/31

Y1 - 2008/8/31

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 16th International Conference on Ion Beam Modification of Materials

Y2 - 31 August 2008 through 5 September 2008

ER -