Investigation of Non-uniform Plasma Sheath during Plasma Immersion Ion Implantation

X.B. Tian; S.Q. Yang; R.K.Y. Fu; P.K. Chu

Investigation of Non-uniform Plasma Sheath during Plasma Immersion Ion Implantation

X.B. Tian, S.Q. Yang, R.K.Y. Fu, P.K. Chu

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Pages	69
Publication status	Published - Apr 2004
Event	International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2004) - Town and Country Hotel, San Diego, United States Duration: 19 Apr 2004 → 23 Apr 2004

Conference

Conference	International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2004)
Abbreviated title	ICMCTF 2004
Place	United States
City	San Diego
Period	19/04/04 → 23/04/04

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Research Unit(s) information for this publication is provided by the author(s) concerned.

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@conference{d61bf8ec6d9449438989fe2622cba46f,

title = "Investigation of Non-uniform Plasma Sheath during Plasma Immersion Ion Implantation",

author = "X.B. Tian and S.Q. Yang and R.K.Y. Fu and P.K. Chu",

note = "Research Unit(s) information for this publication is provided by the author(s) concerned.; International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2004), ICMCTF 2004 ; Conference date: 19-04-2004 Through 23-04-2004",

year = "2004",

month = apr,

language = "English",

pages = "69",

}

Investigation of Non-uniform Plasma Sheath during Plasma Immersion Ion Implantation. / Tian, X.B.; Yang, S.Q.; Fu, R.K.Y. et al.
2004. 69 Paper presented at International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2004), San Diego, United States.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Investigation of Non-uniform Plasma Sheath during Plasma Immersion Ion Implantation

AU - Tian, X.B.

AU - Yang, S.Q.

AU - Fu, R.K.Y.

AU - Chu, P.K.

N1 - Research Unit(s) information for this publication is provided by the author(s) concerned.

PY - 2004/4

Y1 - 2004/4

M3 - RGC 32 - Refereed conference paper (without host publication)

SP - 69

T2 - International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2004)

Y2 - 19 April 2004 through 23 April 2004

ER -