Investigation of Inner Surface of Silicon Microchannels Fabricated by Electrochemical Method

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Pengliang Ci
  • Jing Shi
  • Li Sun
  • Tao Liu
  • Lianwei Wang

Detail(s)

Original languageEnglish
Pages (from-to)11045-11048
Journal / PublicationJournal of Nanoscience and Nanotechnology
Volume11
Issue number12
Publication statusPublished - 1 Dec 2011

Conference

Title3rd IEEE International NanoElectronics Conference (INEC 2010)
LocationCity University of Hong Kong
PlaceChina
CityHong Kong
Period3 - 8 January 2010

Abstract

Various silicon-based microchannels with different internal surface morphologies were investigated to improve the growth of carbon nanotubes on the inner surface of the pore wall. The morphology of the samples prepared under different conditions was characterized by scanning electron microscopy. Parameters such as concentration of hydrofluoric acid, potential, current density, temperature and so on were found to affect the inner surface of the pore wall. Experiments showed that certain etchant concentration, current density and temperature were important to the fabrication of samples with the regular structure and good morphology. By considering these factors, samples with the proper internal pore surface could be fabricated. Nickel was adopted as the metallic catalyst during electroless deposition onto the surface of the pore wall and bottom. The nickel/silicon microchannels were characterized and found to be suitable for the fabrication of carbon nanotubes by thermal chemical vapor deposition.

Research Area(s)

  • Carbon nanotubes, Electron emission, Microchannels, Silicon-based, Surface morphology

Citation Format(s)

Investigation of Inner Surface of Silicon Microchannels Fabricated by Electrochemical Method. / Ci, Pengliang; Shi, Jing; Sun, Li; Liu, Tao; Wang, Lianwei; Chu, Paul K.

In: Journal of Nanoscience and Nanotechnology, Vol. 11, No. 12, 01.12.2011, p. 11045-11048.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review