Investigation of Inner Surface of Silicon Microchannels Fabricated by Electrochemical Method

Various silicon-based microchannels with different internal surface morphologies were investigated to improve the growth of carbon nanotubes on the inner surface of the pore wall. The morphology of the samples prepared under different conditions was characterized by scanning electron microscopy. Parameters such as concentration of hydrofluoric acid, potential, current density, temperature and so on were found to affect the inner surface of the pore wall. Experiments showed that certain etchant concentration, current density and temperature were important to the fabrication of samples with the regular structure and good morphology. By considering these factors, samples with the proper internal pore surface could be fabricated. Nickel was adopted as the metallic catalyst during electroless deposition onto the surface of the pore wall and bottom. The nickel/silicon microchannels were characterized and found to be suitable for the fabrication of carbon nanotubes by thermal chemical vapor deposition.