Investigation of Enhanced Glow Discharge Plasma Immersion Ion Implantation into Rod Target

J H LI; L H LI; Q Y LU; D T K KWOK; R K Y FU; Z WANG; Paul CHU

Investigation of Enhanced Glow Discharge Plasma Immersion Ion Implantation into Rod Target

J H LI
, L H LI
, Q Y LU
, D T K KWOK
, R K Y FU
, Z WANG
, Paul CHU

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - 13 Sept 2009
Event	16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2009) - Tokyo, Japan Duration: 13 Sept 2009 → 18 Sept 2009

Conference

Conference	16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2009)
Place	Japan
City	Tokyo
Period	13/09/09 → 18/09/09

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@conference{569045ab8e9942b0bcba34e0840a93eb,

title = "Investigation of Enhanced Glow Discharge Plasma Immersion Ion Implantation into Rod Target",

author = "LI, \{J H\} and LI, \{L H\} and LU, \{Q Y\} and KWOK, \{D T K\} and FU, \{R K Y\} and Z WANG and Paul CHU",

year = "2009",

month = sep,

day = "13",

language = "English",

note = "16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2009) ; Conference date: 13-09-2009 Through 18-09-2009",

}

Investigation of Enhanced Glow Discharge Plasma Immersion Ion Implantation into Rod Target. / LI, J H; LI, L H; LU, Q Y et al.
2009. Paper presented at 16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2009), Tokyo, Japan.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Investigation of Enhanced Glow Discharge Plasma Immersion Ion Implantation into Rod Target

AU - LI, J H

AU - LI, L H

AU - LU, Q Y

AU - KWOK, D T K

AU - FU, R K Y

AU - WANG, Z

AU - CHU, Paul

PY - 2009/9/13

Y1 - 2009/9/13

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB 2009)

Y2 - 13 September 2009 through 18 September 2009

ER -