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Intrinsic and N-Related Defects in Hydrogen-Free ZnO Films Fabricated by Plasma Immersion Ion Implantation

  • Y. F. Mei
  • , Ricky K. Y. Fu
  • , G. G. Siu
  • , Paul K. Chu
  • , C. L. Yang
  • , W. K. Ge

    Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

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