Interfacial Effects on the Premature Failure of Polycrystalline Silicon Structural Films

Engineering

• Fatigue Life 100%
• Premature Failure 100%
• Polysilicon 100%
• Thin film silicon 100%
• Oxide Layer 50%
• Thin Films 50%
• Numerical Model 50%
• Structural Application 50%
• Crack Growth 50%
• Critical Crack 50%
• Fatigue Behavior 50%
• Failure Mechanism 50%
• Crack Size 50%
• Fatigue Failure 50%
• Catastrophic Failure 50%
• Ambient Air 50%
• Bulk Silicon 50%
• Microelectromechanical System 50%
• Cyclic Fatigue 50%
• Stress Amplitude 50%
• Scale Structure 50%
• Room Air Temperature 50%
• Silicon Dioxide 50%
• Fracture Strength 50%