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Interfacial and electrical characteristics of Al2O3 gate dielectric on fully depleted SiGe on insulator

  • Zengfeng Di
  • , Miao Zhang
  • , Weili Liu
  • , Qinwo Shen
  • , Suhua Luo
  • , Zhitang Song
  • , Chenglu Lin
  • , Anping Huang
  • , Paul K. Chu*
    • *Corresponding author for this work

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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