Insights into effects of annealing on microstructure from SnO2 thin films prepared by pulsed delivery

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

4 Scopus Citations
View graph of relations

Author(s)

  • Z. W. Chen
  • G. Liu
  • H. J. Zhang
  • G. J. Ding
  • Z. Jiao
  • M. H. Wu

Detail(s)

Original languageEnglish
Pages (from-to)2647-2652
Journal / PublicationJournal of Non-Crystalline Solids
Volume355
Issue number52-54
Publication statusPublished - 15 Dec 2009

Abstract

Tin dioxide thin films were prepared by pulsed laser deposition techniques on clean glass substrates, and the thin films were then annealed for 30 min from 50 to 550 °C with a step of 50 °C, respectively. The influence of the annealing temperature on the microstructural and morphological properties of the tin dioxide thin films was investigated using X-ray diffraction, scanning electron microscopy, transmission electron microscopy and selected area electron diffraction. The experimental results showed that the amorphous microstructure almost transformed into a polycrystalline tin dioxide phase exhibiting a preferred orientation related to the (1 1 0), (1 0 1) and (2 1 1) crystal planes with increased temperatures. The thin film annealed at 200 °C demonstrated the best crystalline properties, viz. optimum growth conditions. However, the thin film annealed at 100 °C revealed the minimum average root-mean-square roughness of 20.6 nm with average grain size of 26.6 nm. These findings indicate that the annealing temperature is very important parameter to determining the thin film quality, which involves the phase formation, microstructure and preferred orientation of the thin films. © 2009 Elsevier B.V. All rights reserved.

Research Area(s)

  • Crystal growth, Laser deposition, Microcrystallinity, Nanocrystals, Thin film transistors, X-ray diffraction

Citation Format(s)

Insights into effects of annealing on microstructure from SnO2 thin films prepared by pulsed delivery. / Chen, Z. W.; Liu, G.; Zhang, H. J.; Ding, G. J.; Jiao, Z.; Wu, M. H.; Shek, C. H.; Wu, C. M L; Lai, J. K L.

In: Journal of Non-Crystalline Solids, Vol. 355, No. 52-54, 15.12.2009, p. 2647-2652.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review