TY - JOUR
T1 - Inner surface ion implantation using deflecting electric field
AU - Liu, Aiguo
AU - Wang, Xiaofeng
AU - Chen, Qingchuan
AU - Tang, Baoyin
AU - Chu, Paul K.
PY - 1998/9/1
Y1 - 1998/9/1
N2 - Because of its non line-of-sight nature, researchers have recently focused on plasma immersion ion implantation (PIII) to enhance the properties of inner surfaces of industrial components to combat wear and corrosion. However, theoretical simulation has shown a relatively dim prospect because of the limitation on impact energy and retained dose. In this paper, we describe a procedure to improve the efficiency of inner surface implantation by using a symmetrical experimental setup and deflecting electric field. Improvements of 43% and 71% are observed for the implantation depth and retained dose, respectively. Since a large portion of the ions implanted into the interior surface originate from outside of the bore, a longer pulse-width will be more beneficial. © 1998 Elsevier Science B.V. All rights reserved.
AB - Because of its non line-of-sight nature, researchers have recently focused on plasma immersion ion implantation (PIII) to enhance the properties of inner surfaces of industrial components to combat wear and corrosion. However, theoretical simulation has shown a relatively dim prospect because of the limitation on impact energy and retained dose. In this paper, we describe a procedure to improve the efficiency of inner surface implantation by using a symmetrical experimental setup and deflecting electric field. Improvements of 43% and 71% are observed for the implantation depth and retained dose, respectively. Since a large portion of the ions implanted into the interior surface originate from outside of the bore, a longer pulse-width will be more beneficial. © 1998 Elsevier Science B.V. All rights reserved.
KW - Inner surface modification
KW - Plasma immersion ion implantation
UR - http://www.scopus.com/inward/record.url?scp=0032164736&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0032164736&origin=recordpage
U2 - 10.1016/S0168-583X(98)00382-6
DO - 10.1016/S0168-583X(98)00382-6
M3 - RGC 21 - Publication in refereed journal
SN - 0168-583X
VL - 143
SP - 306
EP - 310
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 3
ER -