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Influence of three classic chromium-based transitions on the behavior of film/substrate interface in diamond-like carbon films

  • Xi Yang
  • , Xiang Yu
  • , Yonghui Wang
  • , Wen Shu
  • , Meng Hua

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    29 Downloads (CityUHK Scholars)

    Abstract

    Three diamond-like carbon (DLC) films with classic chromium-based transitions containing a typical step-like gradient, a linear gradient and a modulation period, were deposited using a mid-frequency dual-magnetron sputtering system. Studies were performed on samples with almost the same Cr content to compare the interfacial structures and compositions of the three chromium-based transitions, and to investigate the internal stress, adhesion strength, and fracture toughness of the films. The synergistic effect of the transitions deterministically influenced the interfacial properties. The films with a linear gradient had the optimal interfacial properties when compared with the other two films. © 2013 AIP Publishing LLC.
    Original languageEnglish
    Article number231607
    JournalApplied Physics Letters
    Volume103
    Issue number23
    DOIs
    Publication statusPublished - 2 Dec 2013

    Publisher's Copyright Statement

    • COPYRIGHT TERMS OF DEPOSITED FINAL PUBLISHED VERSION FILE: This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Xi Yang, Xiang Yu, Yonghui Wang, Wen Shu, and Meng Hua , "Influence of three classic chromium-based transitions on the behavior of film/substrate interface in diamond-like carbon films", Appl. Phys. Lett. 103, 231607 (2013) and may be found at https://doi.org/10.1063/1.4840115.

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