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INFLUENCE OF TEMPERATURE AND ION KINETIC ENERGY ON SURFACE ROUGHNESS OF THIN FILMS FABRICATED BY DUAL PLASMA DEPOSITION

  • L.P. Wang
  • , K.Y. Fu
  • , X.B. Tian
  • , B.Y. Tang
  • , P.K. Chu

    Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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