Influence of substrate bias on microstructural evolution and mechanical properties of TiAlSiN thin films deposited by pulsed-DC magnetron sputtering

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Research OutputsResearch Output authored by Influence of substrate bias on microstructural evolution and mechanical properties of TiAlSiN thin films deposited by pulsed-DC magnetron sputtering is tagged with the concept