INFLUENCE OF SILICIDE FORMATION ON SHALLOW p-n JUNCTION CHARACTERISTICS.

C. Y. Ting; M. Wittmer; K. N. Tu

INFLUENCE OF SILICIDE FORMATION ON SHALLOW p-n JUNCTION CHARACTERISTICS.

C. Y. Ting, M. Wittmer, K. N. Tu

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Proceedings - The Electrochemical Society
Publisher	Electrochemical Soc Inc
Pages	242-249
Volume	82-7
Publication status	Published - 1982
Externally published	Yes

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Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

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@inproceedings{c7d6056758ad4f05a50e24b281e68358,

title = "INFLUENCE OF SILICIDE FORMATION ON SHALLOW p-n JUNCTION CHARACTERISTICS.",

author = "Ting, {C. Y.} and M. Wittmer and Tu, {K. N.}",

note = "Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].",

year = "1982",

language = "English",

volume = "82-7",

pages = "242--249",

booktitle = "Proceedings - The Electrochemical Society",

publisher = "Electrochemical Soc Inc",

}

TY - GEN

T1 - INFLUENCE OF SILICIDE FORMATION ON SHALLOW p-n JUNCTION CHARACTERISTICS.

AU - Ting, C. Y.

AU - Wittmer, M.

AU - Tu, K. N.

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 1982

Y1 - 1982

UR - http://www.scopus.com/inward/record.url?scp=0020304127&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0020304127&origin=recordpage

M3 - RGC 32 - Refereed conference paper (with host publication)

VL - 82-7

SP - 242

EP - 249

BT - Proceedings - The Electrochemical Society

PB - Electrochemical Soc Inc

ER -

INFLUENCE OF SILICIDE FORMATION ON SHALLOW p-n JUNCTION CHARACTERISTICS.

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