INFLUENCE OF SILICIDE FORMATION OF SHALLOW p-n JUNCTION CHARACTERISTICS.

C. Y. Ting; M. Wittmer; K. N. Tu

INFLUENCE OF SILICIDE FORMATION OF SHALLOW p-n JUNCTION CHARACTERISTICS.

C. Y. Ting, M. Wittmer, K. N. Tu

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Original language	English
Pages (from-to)	257-258
Journal	Electrochemical Society Extended Abstracts
Volume	82-2
Publication status	Published - 1982
Externally published	Yes

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Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

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@article{dc439ce272534cfc81019dcd52ec5326,

title = "INFLUENCE OF SILICIDE FORMATION OF SHALLOW p-n JUNCTION CHARACTERISTICS.",

author = "Ting, {C. Y.} and M. Wittmer and Tu, {K. N.}",

note = "Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected]. ",

year = "1982",

language = "English",

volume = "82-2",

pages = "257--258",

journal = "Electrochemical Society Extended Abstracts",

issn = "0160-4619",

}

TY - JOUR

T1 - INFLUENCE OF SILICIDE FORMATION OF SHALLOW p-n JUNCTION CHARACTERISTICS.

AU - Ting, C. Y.

AU - Wittmer, M.

AU - Tu, K. N.

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 1982

Y1 - 1982

UR - http://www.scopus.com/inward/record.url?scp=0020248451&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0020248451&origin=recordpage

M3 - RGC 21 - Publication in refereed journal

SN - 0160-4619

VL - 82-2

SP - 257

EP - 258

JO - Electrochemical Society Extended Abstracts

JF - Electrochemical Society Extended Abstracts

ER -

INFLUENCE OF SILICIDE FORMATION OF SHALLOW p-n JUNCTION CHARACTERISTICS.

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