TY - JOUR
T1 - Infinite dimension system approach for hybrid force/position control in micromanipulation
AU - Shen, Yantao
AU - Xi, Ning
AU - Wejinya, U. C.
AU - Li, Wen J.
AU - Xiao, Jizhong
PY - 2004
Y1 - 2004
N2 - This paper aims at developing a force-guided micromanipulation technology with in-situ PVDF beam force sensing and hybrid force/position control based on an infinite dimensional system model. By using the designed PVDF force sensing cantilever composite structure with high sensitivity, the micro contact force/impact signal and its derivative can be extracted and processed. As the sensor structure installed at the end of micromanipulator is a soft beam, when manipulation is performed, the cantilever beam is necessary to be considered as a distributed parameter flexible link, then we developed a hybrid micro contact force/position control scheme on the basis of an infinite dimension system model. Experimental results verify the performance of the developed micro force sensing and hybrid control scheme. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices.
AB - This paper aims at developing a force-guided micromanipulation technology with in-situ PVDF beam force sensing and hybrid force/position control based on an infinite dimensional system model. By using the designed PVDF force sensing cantilever composite structure with high sensitivity, the micro contact force/impact signal and its derivative can be extracted and processed. As the sensor structure installed at the end of micromanipulator is a soft beam, when manipulation is performed, the cantilever beam is necessary to be considered as a distributed parameter flexible link, then we developed a hybrid micro contact force/position control scheme on the basis of an infinite dimension system model. Experimental results verify the performance of the developed micro force sensing and hybrid control scheme. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices.
UR - http://www.scopus.com/inward/record.url?scp=3042578630&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-3042578630&origin=recordpage
U2 - 10.1109/ROBOT.2004.1307503
DO - 10.1109/ROBOT.2004.1307503
M3 - RGC 22 - Publication in policy or professional journal
SN - 1050-4729
VL - 2004
SP - 2912
EP - 2917
JO - Proceedings - IEEE International Conference on Robotics and Automation
JF - Proceedings - IEEE International Conference on Robotics and Automation
IS - 3
T2 - Proceedings- 2004 IEEE International Conference on Robotics and Automation
Y2 - 26 April 2004 through 1 May 2004
ER -
