INDIUM DIFFUSION PROFILES IN THIN SIMOX SILICON-ON-INSULATOR

P. Chen, Z. H. An, M. Zhu, R. K. Y. Fu, P. K. Chu

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - May 2004
Event	European Materials Research Society 2004 Spring Meeting (E-MRS 2004 Spring Meeting) - Duration: 24 May 2004 → 28 May 2004 https://www.european-mrs.com/about/history

Conference	European Materials Research Society 2004 Spring Meeting (E-MRS 2004 Spring Meeting)
Period	24/05/04 → 28/05/04
Internet address	https://www.european-mrs.com/about/history

Other Access Options

@conference{447c9704014043d2bad28ba6f40821fc,

title = "INDIUM DIFFUSION PROFILES IN THIN SIMOX SILICON-ON-INSULATOR",

author = "P. Chen and An, {Z. H.} and M. Zhu and Fu, {R. K. Y.} and Chu, {P. K.}",

year = "2004",

month = may,

language = "English",

note = "European Materials Research Society 2004 Spring Meeting (E-MRS 2004 Spring Meeting) ; Conference date: 24-05-2004 Through 28-05-2004",

url = "https://www.european-mrs.com/about/history",

}

TY - CONF

T1 - INDIUM DIFFUSION PROFILES IN THIN SIMOX SILICON-ON-INSULATOR

AU - Chen, P.

AU - An, Z. H.

AU - Zhu, M.

AU - Fu, R. K. Y.

AU - Chu, P. K.

PY - 2004/5

Y1 - 2004/5

UR - http://www.cityu.edu.hk/phy/appkchu/Publications/2004/04.C28.pdf

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - European Materials Research Society 2004 Spring Meeting (E-MRS 2004 Spring Meeting)

Y2 - 24 May 2004 through 28 May 2004

ER -